Momentive Performance Materials Gmbh

Zhong-Hao Lu

Yuji Morikawa

Yoshihiko Matsui

John T Mariner

Douglas Alan Longworth

David Michael Rusinko, Jr

Akinobu Otaka

Kensuke Fujimura

Donald William Pultz, Jr

Timothy J Hejl

Takeshi Higuchi

Joseph Patrick Reyes

Jacqueline M More

Tomoo Hasegawa

Rohit Arun Bhosale

Sudarshan Natarajan

Feng Liao

A heater comprises a plurality of zones with at least two zones having a variable power density gradient different from one another. The heater having zones of different variable power density gradients allows for controlling the heat output and temperature profile of the heater in one or more directions of the heater. The heater can be used, for example, to control the temperature profile in a vertical direction.

Multi-zone variable power density heater apparatus containing and methods of using the same

A coated graphite heater. The heater has a configuration comprising a plurality of heating elements having a major portion disposed parallel to an upper surface of the heater so that the major portion is disposed horizontally. The heater configuration provides a heater that exhibits reduced thermal stress and/or reduced CTE mismatch stress particularly compared to designs having heating elements with a major portion oriented perpendicular to the plane of the upper surface of the heater.

One-coat encapsulated graphite heater and process

A heater assembly is disclosed herein. The heater assembly may comprise a tubular body. The tubular body may include a graphite core disposed in a heating path. The graphite core may be coated with an overcoat layer. The tubular body may include slits that may cut-off heat transfer between portions of the tubular body. The heater assembly may have a configuration comprising a plurality of heating rungs having a predominant portion disposed substantially perpendicular to an upper surface of the heater so that the predominant portion is disposed vertically. The heater assembly may include a flange at a first end and a lip at a second end. The heater assembly configuration provides a heater that exhibits reduced thermal stress and/or reduced CTE mismatch stress particularly compared to other designs.

Cylindrical heater

A resistance heater is shown and described. The resistance heater may include a body. The body may include at least one heating surface, the heating surface being generally smooth and generally flat and a recess formed in the body, at least a portion of the body having a cross-sectional shape selected from the group consisting of: generally U shape, generally I-shape, and generally H-shape, and where the cross-sectional shape extends along at least a portion of the body.

Resistance heater

A containment vessel for evaporating materials for use in applying film coatings to a substrate includes a body fabricated from a refractory material. In one embodiment the body includes end portions capable of being connected to other bodies in an end to end fashion. In another embodiment, the body includes an integral patterned conductor incorporated into the outer surface portion of the body to facilitate association with an electrical power source for heating.

Large volume evaporation source

There is disclosed a wafer processing apparatus having optimized electrode patterns for its resistive heating element. The optimized electrode pattern is designed to compensate for the heat loss around contact areas, electrical connections, and through-holes, etc., by generating more heat near or around those areas, providing maximum temperature uniformity. In another embodiment of the optimized design of the invention, the resistance of heating element closely matches the impedance of the power supply for higher efficiency, especially when higher operating temperature or higher electrical power is required.

Electrode pattern for resistance heating element and wafer processing apparatus

Growing community of inventors

Twinsburg, OH, United States of America

Zhong-Hao Lu