Louisiana State University and Agricultural & Mechanical College

Zhong-Geng Ling

Kun Lian

A method to decrease the surface roughness of exposed PMMA surfaces has been discovered. PMMA surface roughness was decreased by a post-exposure heat treatment of less than 70&deg; C. The optimum post-exposure heat treatment to produce a PMMA microstructures with a smooth surface was found to be about 60&deg; C. for about 30 min. The structural features of post-exposure heat-treated PMMA patterns were not statistically different from otherwise identical features of untreated PMMA patterns. This method produces a smoother PMMA structure that may then optionally be glued on a substrate or that may be assembled with other PMMA structures into a three-dimensional or multilayer microstructure.

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Baton Rouge, LA, United States of America

Zhong-Geng Ling