Beijing Tongmei Xtal Technology Co., Ltd.

Zhizhen Wang

Yu Liu

Wei Gao

Haimiao Li

The present invention provides a method for detecting surface haze of materials, comprising: optionally, preliminary inspection, which is conducted on materials, to identify the materials with no visible surface defects; and surface haze inspection, to detect the surface haze of the materials; wherein an optical filter module is configured in surface haze inspection setup to filter off the photoluminescence signal of the materials in the light path to the detector, so as to avoid the photoluminescence signal being detected by the detector. The invention further provides a setup for detecting surface haze of materials. By using the invented method and setup for detecting surface haze, it is possible to accurately obtain the surface haze value and/or distribution of the materials.

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Beijing, China

Zhizhen Wang