Chinese Academy of Sciences

Changxin Memory Technologies, Inc.

Zhiyuan Lu

Liang Chen

Ning Yan

Minyou Ye

Xingquan Wu

Xiangyu Zhang

Dehong Chen

Guosheng Xu

A manufacturing method of a semiconductor structure includes: providing substrate including array area and peripheral area, where peripheral area includes mark area and blank area adjoining mark area; forming, on substrate, target layer and first core layer disposed on target layer, first core layer including first array core layer disposed on array area, first mark core layer disposed on mark area and first cap layer disposed on blank area, where first cap layer has inclined sidewall, and its top dimension is smaller than its bottom dimension; forming first dielectric layer covering sidewall of first core layer; forming first filling layer covering surface of first dielectric layer and filling gap in first core layer; and etching first dielectric layer and target layer along sidewalls of first array core layer and first mark core layer to transfer pattern of first core layer and pattern of first filling layer to target layer.

Semiconductor structure and manufacturing method of semiconductor structure

The present disclosure provides a stellarator magnet based on cubic permanent magnet blocks and an arrangement optimization method thereof. For the characteristic that a three-dimensional magnet coil of a stellarator is complex in structure, the present disclosure provides the stellarator magnet based on the cubic permanent magnet blocks with uniform magnetization, same magnetization and same size; the magnetization directions of the cubic permanent magnet blocks are defined in a limited number of fixed alternative directions; the magnetic field configuration of the stellarator is generated by dipole magnetic fields provided by the permanent magnet blocks and planar coils, so that the device complexity of the stellarator is reduced, and the difficulty and cost of the machining and installation of the magnet are reduced. The shape of the permanent magnet blocks can be replaced by other regular shapes, and the permanent magnet is still formed by the permanent magnet blocks with same shape, same size, uniform magnetization and same magnetization. For the magnet, the present disclosure provides a magnet arrangement optimization method of 'local compensation' and related optimization strategies of 'threshold truncation,' &#x2018;global fine tuning,&#x2019; etc., for meeting different optimization requirements on accuracy of the magnetic fields, usage qualities of magnets, etc., and a magnetic field meeting designing requirements can be obtained.

Stellarator magnet based on cubic permanent magnet blocks and arrangement optimization method thereof

Growing community of inventors

Hefei, China

Zhiyuan Lu