Raytheon Company

Zhimin J Yao

John Charles Ehmke

Charles L Goldsmith

Susan M Eshelman

Brandon William Pillans

Shea Chen

Andrew Malczewski

A micro-electro-mechanical (MEMS) switch ( ) has an electrode ( ) covered by a dielectric layer ( ), and has a flexible conductive membrane ( ) which moves between positions spaced from and engaging the dielectric layer. At least one of the membrane and dielectric layer has a textured surface ( ) that engages the other thereof in the actuated position. The textured surface reduces the area of physical contact through which electric charge from the membrane can tunnel into and become trapped within the dielectric layer. This reduces the amount of trapped charge that could act to latch the membrane in its actuated position, which in turn effects a significant increase in the operational lifetime of the switch.

Membrane for micro-electro-mechanical switch, and methods of making and using it

A switch includes a conductive region, a membrane, and a dielectric region. The dielectric region is formed from a dielectric material and is disposed between the membrane and the conductive region. When a sufficient voltage is applied between the conductive region and the membrane, a capacitive coupling between the membrane and the conductive region is effected. The dielectric material has a resistivity sufficiently low to inhibit charge accumulation in the dielectric region during operation of the switch.

Method and apparatus for switching high frequency signals

A method of forming a three-dimensional micro-coil on a substrate (10) is provided which consists of forming a first metal layer (14) on the substrate (10). The first metal layer (14) is partitioned into a first plurality of metal strips (16). A sacrificial layer (18) is formed on the first plurality of metal strips (16). A second metal layer (24) is formed on the sacrificial layer (18). The second metal layer (24) is then partitioned into a second plurality of metal strips (26) such that a continuous loop of metal is formed between the first plurality of metal strips (16) and the second plurality of metal strips (26). This continuous loop of metal defines windings for a three-dimensional micro-coil (28) with one side in contact with the substrate (10).

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Dallas, TX, United States of America

Zhimin J Yao