Yangtze Memory Technologies Co., Ltd.

Zhiliang Xia

Wenxi Zhou

Kun Zhang

Zongliang Huo

Zhong Zhang

Yuancheng Yang

Di Wang

Zhongwang Sun

Lei Liu

Linchun Wu

Wei Liu

Wenyu Hua

Tao Yang

Fandong Liu

Liang Chen

Yanhong Wang

Li Hong Xiao

ZongLiang Huo

Jia He

Qiang Xu

DongXue Zhao

Rui Su

Peizhen Hong

Yaohua Yang

Yaobin Feng

Qingchen Cao

Dongxue Zhao

Jun Chen

Guangji Li

Kun Bao

Ping Yan

Xiaoxin Liu

Zi Qun Hua

Baoyou Chen

Tingting Gao

Haihui Huang

Jiwei Cheng

Jun Liu

Yuhui Han

Zhi Zhang

Wei Xie

Tingting Zhao

Changzhi Sun

Bingguo Wang

Lu Ming Fan

Bi Feng Li

Haojie Song

Shijin Luo

Ming Hu

Lei Jin

Qiguang Wang

Shan Li

Ziqun Hua

Cheng Gan

Bo Huang

Yanwei Shi

Yue Qiang Pu

Jianzhong Wu

Xiaolong Du

Linchen Wu

Jiayi Liu

Yingjie Ouyang

Yueqiang Pu

Jifeng Zhu

Lei Xue

Qi Wang

Jin Wen Dong

Wanbo Geng

Bin Yuan

Xiang Fu

He Chen

Lei Li

Cuicui Kong

Bingjie Yan

Zhiguo Zhao

Zhaoyun Tang

Lichuan Zhao

Huang Peng Zhang

Qiangmin Wei

Chao Shen

Hua Min Cao

Dandan Shi

Cheng Zhou

Jingtao Xie

Dongyu Fan

QingBo Liu

Song Man Xu

Siying Liu

Hai Song

Yan Gu

Rui Gong

Junzhan Liu

Xin Yun Huang

Ming Shao

A memory device includes an array of memory cells disposed on a first side of a first semiconductor layer, and a peripheral circuit bonded to the array of memory cells. Each of the memory cells includes a semiconductor body extending in a first direction, a first terminal and a second terminal are formed at both ends of the semiconductor body; a word line extending in a second direction perpendicular to the first direction; plate lines extending in the second direction; and a first dielectric layer disposed between the semiconductor body and the word line and the plate line.

Memory devices and methods for forming the same

A semiconductor device includes an insulating layer, a conductive layer stacking with the insulating layer and including a first conductive sublayer and a second conductive sublayer, a memory stack disposed on a side of the conductive layer away from the insulating layer, a spacer structure through the conductive layer, a contact structure in the spacer structure and extending vertically through the insulating layer, and a channel structure including a semiconductor channel. The contact structure includes a first contact portion and a second contact portion in contact with each other. A lateral cross-sectional area of the second contact portion is greater than a lateral cross-sectional area of the first contact portion. A portion of the semiconductor channel is in contact with the first conductive sublayer. The second conductive sublayer is disposed between the first conductive sublayer and the memory stack.

Semiconductor device including a memory stack and a contact structure in a spacer structure

A 3D memory device includes a conductor/insulator stack containing a conductive layer and a dielectric layer alternatingly stacked, channel hole structures in a first region of memory cells in the conductor/insulator stack, a blocking structure adjacent to the first region, and a dummy channel hole structure in the first region. The dummy channel hole structure is adjacent to the blocking structure, and includes a dielectric material that fills a channel hole to form a first dielectric filling structure.

Three-dimensional memory device and fabrication method for improved yield and reliability

The present disclosure provides a three-dimensional memory device and a manufacturing method thereof. The three-dimensional memory device comprises: a plurality of stacked layers; a storage channel structure vertically penetrating the stacked layers and comprising a first channel layer; a select gate structure on the plurality of stacked layers and comprising a conductive layer sandwiched between two dielectric layers; and a select channel structure vertically penetrating the select gate structure and comprising a second channel layer.

Three-dimensional memory device, manufacturing method thereof, and memory system

A semiconductor device semiconductor device includes a stack having a first surface and a second surface opposing the first surface. The stack can include word line layers and insulating layers alternating with the word line layers between the first surface and the second surface. The stack can further include a process stop layer between the lower most insulating layer and the second surface. The stack can extend along an X-Y plane having an X direction and a Y direction perpendicular. The semiconductor device can further include a slit structure crossing the stack between the first surface and the second surface in Z direction. In a cross-section perpendicular to the Y direction, distances between the slit structure and the process stop layer at two sides of the slit structure are each larger than distances at either side of the slit structure between the word line layers and the slit structure.

Three-dimensional NAND memory device having word line contact with dielectric filler

According to an aspect of the disclosure, a semiconductor device is provided. The semiconductor device includes a stack structure of alternating insulating layers and word line layers, a first top select gate (TSG) layer over the stack structure, and a separation structure extending through the first TSG layer, where the first TSG layer is divided by the separation structure into a first sub TSG layer and a second sub TSG layer. The semiconductor device includes a conductive layer positioned between the first sub TSG layer and the separation structure, and between the second sub TSG layer and the separation structure.

Three-dimensional memory device and method of forming the same

The three-dimensional memory includes a stack structure which includes: a first stack and a second stack, the first stack including control gate layers and first dielectric layers which are stacked alternately, the second stack including top select gate layers and second dielectric layers which are stacked alternately in the same stacking direction; a plurality of channel structures which run though the stack structure and include charge storage layers, the charge storage layers including a plurality of charge storage portions disposed discontinuously in the stacking direction, the charge storage portions being disposed between the adjacent first dielectric layers; and at least one isolation structure which runs through the top select gate layers and is located between the adjacent channel structures.

Three-dimensional memories having isolation structures and fabrication methods thereof

Aspects of the disclosure provide a semiconductor device. The semiconductor device includes a stack of conductive layers and insulating layers stacked alternatingly in a first direction. The stack of conductive layers and insulating layers has a first side and a second side in the first direction. The semiconductor device then includes a semiconductor layer at the first side of the stack of conductive layers and insulating layers, and a first isolation structure extending through, in the first direction, the semiconductor layer and a subset of the stack of conductive layers and insulating layers. The subset of the stack of conductive layers and insulating layers includes a first conductive layer. The first isolation structure separates a first portion of the first conductive layer from a second portion of the first conductive layer.

Memory system, semiconductor device and fabrication method therefor

Aspects of the disclosure provide a semiconductor device and a method to manufacture the semiconductor device. A channel hole is formed in a stack including alternating first layers and second layers. The stack is formed over a substrate of the semiconductor device. A gate dielectric layer and a channel layer are sequentially formed in the channel hole. Laser annealing is performed on the channel layer using laser light. An incidence angle of the laser light on an upper surface of the channel layer causes a total internal reflection to occur at an interface between the channel layer and the gate dielectric layer and an interface between the channel layer and an insulating layer that is adjacent to the channel layer.

Method of fabricating a semiconductor device using laser annealing

A three-dimensional (3D) memory device includes a stack structure having interleaved conductive layers and dielectric layers, and a channel structure extending through the stack structure along a first direction. The channel structure is in contact with a source of the 3D memory device at a bottom portion of the channel structure. The channel structure includes a semiconductor channel, and a memory film over the semiconductor channel. The memory film includes a first angled structure, and a first diameter of the memory film at the bottom portion below the first angled structure is smaller than a second diameter of the memory film at an upper portion above the first angled structure.

Three-dimensional memory devices and methods for forming the same

Aspects of the disclosure provide a semiconductor device. The semiconductor device includes a stack structure and a contact structure. The stack structure comprises interleaved gate layers and insulating layers. The contact structure comprises a conductive structure and one or more insulating structures. The conductive structure can extend through the stack structure and form a conductive connection with one of the gate layers. The one or more insulating structures surround the conductive structure and electrically isolate the conductive structure from remaining ones of the gate layers. The one or more insulating structures further include one or more first insulating structures. Each of the one or more first insulating structures is disposed between an adjacent pair of the insulating layers, and the one or more first insulating structures are disposed on a first side of the one of the gate layers.

Vertical memory devices and method of fabrication thereof

Three-dimensional (3D) memory devices and methods for forming the same are disclosed. In certain aspects, a 3D memory device includes a first semiconductor assembly, a second semiconductor assembly, and an inter-assembly bonding layer between the first semiconductor assembly and the second semiconductor assembly. The first semiconductor assembly includes a first array structure and a first periphery structure. The first array structure includes a first memory stack having a plurality of interleaved stack conductive layers and stack dielectric layers. The first periphery structure includes a plurality of first peripheral circuits electrically connected to the first memory stack. The second semiconductor assembly includes a second array structure and a second periphery structure. The second array structure includes a second memory stack having a plurality of interleaved stack conductive layers and stack dielectric layers. The second periphery structure includes a plurality of second peripheral circuits electrically connected to the second memory stack.

Three-dimensional memory devices having semiconductor assemblies bonded by bonding layer and methods for forming the same

A method for forming a three-dimensional memory device includes forming an alternating dielectric stack on a substrate and forming an opening extending partially through the alternating dielectric stack. The opening exposes sidewalls of the alternating dielectric stack. The method also includes disposing a protection layer in the opening and on the exposed sidewalls of the alternating dielectric stack. The method further includes extending the opening through the alternating dielectric stack and forming channel layers in the extended opening.

Channel structures for three-dimensional memory devices and methods for forming the same

In certain aspects, a memory device includes a vertical transistor, a storage unit, and a bit line. The vertical transistor includes a semiconductor body extending in a first direction. The semiconductor body includes a doped source, a doped drain, and a channel portion. The storage unit is coupled to a first terminal. The first terminal is one of the source and the drain. The bit line extends in a second direction perpendicular to the first direction and in contact with a second terminal. The second terminal is another one of the source and the drain that is formed on one or some sides, but not all sides, of a protrusion of the semiconductor body. The bit line is separated from the channel portion of the semiconductor body by the second terminal.

Memory devices having vertical transistors and methods for forming the same

The present disclosure relates to a three-dimensional (3D) memory and a fabrication method thereof. The method includes forming a memory chip on a first substrate, disposing a first semiconductor layer on the memory chip, forming a plurality of first contacts through the first semiconductor layer, forming a first peripheral circuit chip based on the first semiconductor layer, disposing a second semiconductor layer on the first peripheral circuit chip, forming a plurality of second contacts through the second semiconductor layer, and forming a second peripheral circuit chip based on the second semiconductor layer. The first peripheral circuit chip is electrically connected with the memory chip through the plurality of first contacts, and the second peripheral circuit chip is electrically connected with the memory chip through the plurality of first and second contacts.

Three-dimensional memory and fabrication method thereof

Growing community of inventors

Wuhan, China

Zhiliang Xia