East China University of Science and Technology

Shanghai Ziyuan Pharmaceutical Co., Ltd.

Shanghai Jiaotong University

Shanghai Huali Microelectronics Corporation

Shanghai Huali Integrated Circuit Corporation

Shanghai Micro Electronics Equipment (group) Co., Ltd.

Sph No. 1 Biochemical & Pharmaceutical Co., Ltd.

East China University of Chemical Technology

Shanghai Micro Electronics Equipment Co., Ltd.

Zhigang Zhang

Guanzhong Lu

Yun Guo

Jun Chen

Jun Xu

Yu Wang

Lin Zhang

Ren Wang

Qiwei Wang

Liuqing Yang

Xiaowen Zhang

Lin Guo

Zhenhui Huang

Jinguo Ding

Minjuan Xu

Shanliang Wu

Youqing Tang

Jianli Huo

Xinlei Zhu

Yaoyu Zhan

Yahui Wang

Qin Bao

The present application provides a process method for improving reliability of a metal gate high-voltage device. Stacks layers formed over the gate oxide layer and spaced apart from each other. An SiCN layer is deposited to cover tops and sidewalls of the stack layers, and cover bottoms of slots between the stack layers. An HARP layer is deposited to covert the SiCN layer. The HARP layer over the stack layers and the slot regions is covered with a photoresist. Photolithography and etching are sequentially performed to open the HARP layer over the stack layers. The photoresist in the slot regions is reserved. The HARP layer over the stack layers outside the slot regions is removed. The operations are repeated for many times until the slot regions are filled with the HARP layer.

Process method for improving reliability of metal gate high-voltage device

A method for making an RRAM resistive structure includes, step 1, forming a via structure, which includes depositing an ultra-low dielectric constant material layer on a substrate, depositing a copper layer on the ultra-low dielectric constant material layer, depositing a carbon-containing silicon nitride layer, and patterning a via in the carbon-containing silicon nitride layer. step 2, filling the via structure with a TaN layer, followed by planarizing a surface of the via structure without dishing; step 3, forming a first TiN layer on the TaN-filled via structure; and step 4, forming an RRAM resistive structure stack having layers of TaOx, TaO, Ta, and a second TiN from bottom to top on the first TiN layer, and step 5, patterning the RRAM resistive structure stack the first TiN layer over the TaN-filled via structure to form the RRAM resistive structure.

Method of making resistive structure of RRAM

Disclosed are a crystallization water-free calcium dibutyryladenosine cyclophosphate crystal form, and a preparation method and a use thereof. In an X-ray powder diffraction pattern using Cu-K&#x3b1; as a source of radiation, the crystallization water-free calcium dibutyryladenosine cyclophosphate crystal form has characteristic peaks at positions where diffraction angles 2&#x3b8; are equal to 12.3&#xb0;&#xb1;0.2&#xb0;, 17.6&#xb0;&#xb1;0.2&#xb0;, 21.4&#xb0;&#xb1;0.2&#xb0;, 24.7&#xb0;&#xb1;0.2&#xb0;, 25.3&#xb0;&#xb1;0.2&#xb0; and 27.8&#xb0;&#xb1;0.2&#xb0;. The crystallization water-free calcium dibutyryladenosine cyclophosphate crystal form of the present invention has a high purity, and good stability; the preparation method is simple and convenient, has good reproducibility, and is easy to industrially popularize and apply.

Crystal-water-free calcium dibutyryladenosine cyclophosphate crystal form and preparation method and application thereof

The present invention opens to the public a method to prepare a benzopyran compound and its use for treating pulmonary fibrosis. A benzopyran compound has a structure (I): in which: R1 represents hydrogen, C1-C4 alkyl, or various remaining amino acid moieties after removal of an amino group; R2 represents hydrogen, C1-C4 alkyl, or various remaining amino acid moieties after removal of an amino group; R3 represents hydrogen, or C1-C4 alkyl; and n is any integer of 1-4, wherein the benzopyran compound is derived from a broth ofCGMCC No. 5675 by extraction, separation and purification. The derivatives of xiamenmycin made from the present invention have a higher bioactivity to suppress the proliferation of normal human lung fibroblast, and medicinal products containing the same are useful in the treatment of pulmonary fibrosis.

Method for preparing benzopyran compound and application thereof in treating pulmonary fibrosis

A magnetic alignment system is disclosed, including a magnet array (), a motor rotor (), a fixed tooling () and a force sensor (). The motor rotor () is disposed over the magnet array () and is connected via the force sensor () to the fixed tooling () that is positionally fixed relative to the magnet array (). By varying an angle of a three-phase current supplied to a specific one of three-phase coil assemblies in the motor rotor () within an angular range for magnetic alignment and measuring a force generated by the specific one of three-phase coil assemblies using the force sensor (), an angle of magnetic alignment for the specific one of three-phase coil assemblies is determinable based on the angle of three-phase current that causes the specific one of three-phase coil assemblies to generate a maximum force.

Magnetic alignment system and alignment method therefor

The present invention relates to the field of medicinal chemistry, and discloses a new crystal form of regadenoson, i.e., a crystal form E of regadenoson, as well as a method for preparing the new crystal form of regadenoson. The crystal form E of regadenoson according to the present invention has excellent performances in terms of radionuclide myocardial perfusion imaging, and has a poor toxicity, good storage stability, and can be used in the preparation of a medicament used as a stress agent for radionuclide myocardial perfusion imaging.

Crystal form of regadenoson and preparation method thereof

A method for preparing monolithic catalyst washcoat is disclosed and includes the following steps: preparing a coating slurry; pretreating a monolithic carrier; applying the coating slurry onto the monolithic carrier by vacuum spraying; removing the excess coating slurry by vacuum extraction; and obtaining the monolithic carrier applied with the washcoat after drying and calcination. The washcoat of 5-20 wt % can be obtained on the monolithic carrier of the present invention by one-off applying. The method can be used to prepare the washcoat on monolithic cordierite ceramic carrier, monolithic metal carrier, monolithic active carbon carrier or monolithic molecular sieve carrier. The obtained washcoat is uniform, and has good adhesion with the carrier and excellent repeatability.

Method for preparing monolithic catalyst washcoat

A close coupled three-way catalyst for purification of exhaust gas of motor vehicle and the preparation thereof. The support is selected from cordierite honeycomb ceramic materials having a pore volume of 0.25-0.35 ml/g. The coating layer is the mixture of hexaaluminate and perovskite-type composite oxide, cerium-zirconium solid solution, rare-earth oxide and alumina, alkali-earth oxide and zeolite having a high Si/Al ratio. The active components are palladium-rhodium, rare-earth oxide and transition metal in the hexaaluminate and perovskite-type composite oxide. The catalyst has not only the function of low-temperature catalytic oxidation of hydrocarbons, but also the function of reduction of nitrogen oxides, and can be used for purifying the exhaust gas of motor vehicles using gasoline, liquid gas, or CNG as fuel.

Close coupled catalyst for purification of exhaust gas and the preparation thereof

A non-precious metal three-way catalyst which reduces hydrocarbon, carbon monoxide, and nitrogen oxide from internal combustion engine exhaust and industrial emissions, with a conversion capability comparable to the conversion efficiencies of current precious metal catalysts, and with superior NO.sub.x conversion characteristics, and durable when operated under prolonged high temperature conditions. The light-off temperature is close to the light-off temperature of convertional precious metal catalysts. The active catalytic components in this catalyst are a mixture of rare-earth metal and non-noble metal oxides.

Non-precious metal three way catalyst

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Shanghai, China

Zhigang Zhang