The 13Th Research Institute of China Electronics Technology Group Corporation

Zhifu Hu

Aihua Wu

Yibang Wang

Faguo Liang

Chen Liu

Ye Huo

Xuefeng Zou

Jian Cao

The disclosure provides a calibration method, a system and a device of an on-wafer S parameter of a vector network analyzer. The method comprises the steps of: acquiring a first parameter of a first crosstalk calibration piece measured by the vector network analyzer; obtaining a main crosstalk error term based on the first parameter of the first crosstalk calibration piece and a calibration parameter of the first crosstalk calibration piece; acquiring a second parameter of a second crosstalk calibration piece measured by the vector network analyzer based on the main crosstalk error term; and obtaining a secondary crosstalk error term based on the second parameter of the second crosstalk calibration piece and a calibration parameter of the second crosstalk calibration piece, wherein the main crosstalk error term and the secondary crosstalk error term are used for calibrating the vector network analyzer.

Calibration method, system and device of on-wafer s parameter of vector network analyzer

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Shijiazhuang, China

Zhifu Hu