Asml Netherlands B.v.

Zhi Po Wang

Yixiang Wang

Chiyan Kuan

Tianming Chen

A system for grounding a mask using a grounding component are provided. Some embodiments of the system include a grounding component comprising a base and an extension protruding from the base and comprising a conductive prong configured to contact a conductive layer of the mask. Some embodiments of the system include a plurality of conductive prongs configured to contact multiple positions of a conductive layer of the mask. Some other embodiments of the system include an extension comprising various shapes.

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Beijing, China

Zhi Po Wang