Shenzhen Technology University

Zhenhuan Qiu

Hui Li

Shupeng Deng

Nannan Li

Jian Feng

Chuyu Zhong

Jinlong Lu

Shihao Ding

Shaochi Pan

Cunzheng Ning

Wanxian Xu

Provided are a new vertical cavity surface emitting laser structure and a manufacturing method thereof. The structure includes a substrate layer, a lower N-type DBR, an active region, an upper N-type DBR and a mixed dielectric DBR sequentially arranged from bottom to top, where a second-class tunnel junction is arranged on one side of the active region close to the upper N-type DBR, where the second-class tunnel junction is embedded in a bottom of the upper N-type DBR and surrounded by the upper N-type DBR, and the substrate layer, the lower N-type DBR, the active region, the upper N-type DBR, the mixed dielectric DBR and the second-class tunnel junction are all coaxial elliptical cylinders; negative electrodes are arranged on the lower N-type DBR, and positive electrodes are arranged on the upper N-type DBRs substrate layer.

Vertical cavity surface emitting laser structure and manufacturing method thereof

Growing community of inventors

Shenzhen, China

Zhenhuan Qiu