Nve Corporation

Other

Zhenghong Qian

James M Daughton

Dexin Wang

Mark Christopher Tondra

Robert T Fayfield

Catherine A Nordman

Carl H Smith

Albrecht Jander

Ru Bai

A three-axis magnetic sensor apparatus is described that is processed together into a single chip, with high performance, low cost, as well as small size. The three-axis magnetic sensor apparatus include a substrate, a two-axis magnetic sensing structure and a single-axis sensing structure. The two-axis sensing magnetic structure consisting of two shielded Wheatstone bridge configurations in conjunction with an annular or semi annular magnetic flux-guiding structure, and the single-axis sensing structure consisting of a push-pull Wheatstone bridge in conjunction with a flux guide that is capable of generating a fringe field whose horizontal component is proportional to the vertical component of an external magnetic field. The two-axis magnetic sensing structure and the single-axis structure are processed together into a single chip, and can be used to measure respectively X, Y and Z components of external magnetic fields.

Three-axis magnetic sensor

A ferromagnetic thin-film based magnetic field sensor with first and second sensitive direction sensing structures each having a nonmagnetic intermediate layer with two major surfaces on opposite sides thereof having a magnetization reference layer on one and an anisotropic ferromagnetic material sensing layer on the other having a length in a selected length direction and a smaller width perpendicular thereto and parallel to the relatively fixed magnetization direction. The relatively fixed magnetization direction of said magnetization reference layer in each is oriented in substantially parallel to the substrate but substantially perpendicular to that of the other. An annealing process is used to form the desired magnetization directions.

Two-axis magnetic field sensor

A ferromagnetic thin-film based magnetic field sensor having a nonmagnetic intermediate layer with two major surfaces on opposite sides thereof upon one of which a magnetization reference layer is provided and upon the other there being provided a sensing layer. A spacer layer is provided on the sensing film to separate this sensing film from an augmenting film with the spacer layer being sufficiently thick so as to significantly reduce or eliminate topological coupling between the sensing and augmenting films, and to significantly randomize spin states of emerging electrons traversing therethrough.

Magnetic field sensor with augmented magnetoresistive sensing layer

A ferromagnetic thin-film based magnetoresistive device with a first ferromagnetic material based film having electrically conductive, ferromagnetic material nanogranules embedded in an intergranular material of a smaller electrical conductivity first nonmagnetic. The device may have an intermediate layer adjacent the first ferromagnetic material based film and a second film is on the other side of the intermediate layer of a substantially ferromagnetic material. The first film is less than 1.0 &mgr;m thick.

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Eden Prairie, MN, United States of America

Zhenghong Qian