Mcube, Inc.

Zheng-Yao Sun

Sanjay Bhandari

Sudheer S Sridharamurthy

Wenhua Zhang

Tony Maraldo

Te-Hsi Terrence Lee

Joseph Rastegar

A method for a MEMS device comprises determining in a computer system, a first driving signal for the MEMS device in response to a first time delay and to a base driving signal, applying the first driving signal to the MEMS device to induce the MEMS device to operate at a first frequency, determining a second driving signal for the MEMS device in response to a second time delay and to the base driving signal, applying the second driving signal to the MEMS device to induce the MEMS device to operate at a second frequency, determining a first quality factor associated with the MEMS device in response to the first frequency and the second frequency, determining a quality factor associated with the MEMS device in response to the first quality factor, and determining whether the quality factor associated with the MEMS device, exceeds a threshold quality factor.

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San Jose, CA, United States of America

Zheng-Yao Sun