Kla-tencor Technologies Corporation

Qualcomm Mems Technologies, Inc.

Carl Zeiss Meditec Ag

Zheng-wu Li

Mehdi Vaez-Iravani

Russell Wayne Gruhlke

Andrew V Hill

Jay Wei

Yuval Ben-Dov

Shiyu Zhang

Hans J Hansen

Ye Yin

Yingjian Wang

Courosh Mehanian

Kurt Zimmermann

This disclosure provides systems, methods and apparatus for an imaging system that includes a light guide having light-turning features that are configured to receive ambient light incident on the light guide, including light scattered from a scene to be imaged, and to direct the received ambient light towards an image sensor. The light-turning features may have angle-discriminating properties so that some light-turning features capture light incident upon the light guide at certain angles of incidence, but not others. Light scattered from multiple parts of a scene to be imaged may then be directed to correlated locations on an image sensor, which provides electronic data representing an image.

Imaging method and system with angle-discrimination layer

A system is provided herein for inspecting a specimen. In one embodiment, the system may include a dual-channel microscope, two illuminators, each coupled for illuminating a different channel of the dual-channel microscope and two detectors, each coupled to a different channel of the dual-channel microscope for acquiring images of the specimen. Means are provided for separating the channels of the dual-channel microscope, so that the two detectors can acquire the images of the specimen at substantially the same time. In one embodiment, the channels of the dual-channel microscope may be spectrally separated by configuring the two illuminators, so that they produce light in two substantially non-overlapping spectral ranges. In another embodiment, the channels of the dual-channel microscope may be spatially separated by positioning the two detectors, so that the illumination light do not overlap and the fields of view of the two detectors do not overlap within a field of view of an objective lens included within the system.

Systems and method for simultaneously inspecting a specimen with two distinct channels

Growing community of inventors

Milpitas, CA, United States of America

Zheng-wu Li