Michigan State University

University of Virginia Patent Foundation

Zheng Chen

Ning Xi

Xiaobo Tan

Yantao Shen

Jianzhong Zhu

Hilary Bart-Smith

A gas flow sensing device, and related method of manufacturing, comprising a conductive layer encapsulated in dielectric film, suspended over a cavity to form a diaphragm. The conductive layer functions as both a heating a sensing element and is patterned to provide uniform heat distribution across the diaphragm. The device is designed to sense flow from any direction relative to the device and the design of the dielectric film and diaphragm reduces sensor drift during prolonged operation.

Gaseous flow sensor and related method thereof

An integrated sensory actuator () which uses an electroactive polymer is provided. The sensory actuator is comprised of an actuating member () made of an ionic polymer-metal composite; a sensing member () made of a piezoelectric material; and an insulating member () interposed between the actuating member and the sensing member. The sensory actuator may further include a compensation circuit adapted to receive a sensed signal from the sensing member and an actuation signal from the actuating member and compensate the sensed signal for feedthrough coupling between the actuating member and the sensing member.

Integrated actuator sensor structure

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Charlottesville, VA, United States of America

Zheng Chen