Chartered Semiconductor Manufacturing Ltd (Corporation)

Zhen Jia Zheng

Lap Chan

Purakh Raj Verma

Shao-fu Sanford Chu

Pradeep Yelehanka

Jian Xun Li

Tong Qing Chen

Tian Hao Gu

Syn Kean Cheah

Zhi Yong Han

Kelvin Ong

A heterojunction bipolar transistor (HBT), and manufacturing method therefor, comprising a semiconductor substrate having a collector region, an intrinsic base region of a compound semiconductive material over the collector region, an extrinsic base region, an emitter structure, an interlevel dielectric layer over the collector region, extrinsic base region and emitter structure, and connections through the interlevel dielectric layer to the base region, the emitter structure, and the collector region. The emitter structure is formed by forming a reverse emitter window over the intrinsic base region, which subsequently is etched to form an emitter window having a multi-layer reverse insulating spacer therein.

Heterojunction bipolar transistor using reverse emitter window

An integrated circuit, and manufacturing method therefor, is provided. A gate dielectric and a gate are provided respectively on and over a semiconductor substrate. A junction is formed adjacent the gate dielectric and a shaped spacer is formed around the gate. A spacer is formed under the shaped spacer and a liner is formed under the spacer. A first dielectric layer is formed over the semiconductor substrate, the shaped spacer, the spacer, the liner, and the gate. A second dielectric layer is formed over the first dielectric layer. A local interconnect opening is formed in the second dielectric layer down to the first dielectric layer. The local interconnect opening in the first dielectric layer is opened to expose the junction in the semiconductor substrate and the first gate. The local interconnect openings in the first and second dielectric layers are filled with a conductive material.

Method of manufacturing semiconductor local interconnect and contact

Growing community of inventors

Singapore, Singapore

Zhen Jia Zheng