National Yang Ming Chiao Tung University

Taiwan Semiconductor Manufacturing Comp. Ltd.

Zhen-Hao Li

Po-Tsun Liu

Tsung-Che Chiang

Yu-Ming Lin

Meng-Han Lin

Bo-Feng Young

Sai-hooi Yeong

Po-Yi Kuo

Hsin-Yi Huang

A thin-film transistor includes a substrate, a first thin-film structure, a gate structure, and a second thin-film structure that are sequentially disposed on one another. The first thin-film structure includes a channel layer, and first source and drain layers disposed at opposite sides of the channel layer. The gate structure includes a common gate electrode disposed on the channel layer, and a gate insulating layer wrapping the common gate electrode and covering the first thin-film structure. The second thin-film structure includes an active layer disposed on the gate insulating layer and including an indium oxide-based material, and second source and drain layers disposed at opposite sides of the active layer.

Thin-film transistor device

A transistor includes a first semiconductor layer, a second semiconductor layer, a semiconductor nanosheet, a gate electrode and source and drain electrodes. The semiconductor nanosheet is physically connected to the first semiconductor layer and the second semiconductor layer. The gate electrode wraps around the semiconductor nanosheet. The source and drain electrodes are disposed at opposite sides of the gate electrode. The first semiconductor layer surrounds the source electrode, the second semiconductor layer surrounds the drain electrode, and the semiconductor nanosheet is disposed between the source and drain electrodes.

Transistor, memory device and manufacturing method of memory device

Growing community of inventors

Tainan, Taiwan

Zhen-Hao Li