Hefei Boe Optoelectronics Technology Co., Ltd.

Boe Technology Group Co., Ltd.

Boe Technology Co., Ltd.

Zhaozeng Wu

Zuhong Liu

Yubao Zi

Qingqing Ma

Hongbo Zhang

Eryuan Huang

Xilong Ding

Chengsheng Wang

A gas and liquid knife and a control method thereof are provided. The gas and liquid knife includes a chamber and a knife head. An ejection opening is provided at the knife head The knife head has a first knife lip and a second knife lip. The ejection opening is defined between a first inner wall of the first knife lip and a second inner wall of the second knife lip. The chamber is defined between the first wall plate and the second wall plate slidably connected with each other. The first knife lip connects to the first wall plate. The second knife lip connects to the second wall plate. The first knife lip and second knife lip moves relatively as the first wall plate and the second wall plate slides relatively, such that a minimum distance between the first inner wall and the second inner wall could be changed.

Gas and liquid knife and control method thereof

A nozzle for use in an etching apparatus and an etching apparatus including the nozzle are provided. The nozzle includes: a hollowed main body having a connector at one end thereof and a main-body outlet at the other end thereof, a main-body connection part being provided at an outer wall of the main body, said one end of the main body being connected with a pipe via the connector and a nozzle sleeve including a nozzle-sleeve connection part and a nozzle-sleeve outlet, the nozzle sleeve being connected to an outer side of said the other end of the main body having the main-body outlet through the nozzle-sleeve connection part and the main-body connection part and the nozzle sleeve is movable relative to the main body in an outflow direction of the main body.

Nozzle and etching apparatus

Growing community of inventors

Beijing, China

Zhaozeng Wu