Tsinghua University

Samsung Electronics Co., Ltd.

Zhaoying Zhou

Xiongying Ye

Xing Yang

Hye-Jung Cho

Qiang Wei

Rong Zhu

Xiaobing Luo

Xiaohao Wang

Xuefeng Sun

Guanglong Wang

Shenshu Xiong

Junhua Zhu

A diaphragm air pump comprises a pump chamber, a diaphragm and one or more piezoelectric beams or bimorphs. Fluid flows into the pump chamber and then flows out of it, the diaphragm is provided within the pump chamber, and one or more central openings are formed in the diaphragm. One or more central check valves are provided in the central openings. The diaphragm is just bonded with piezoelectric beams, not fixed to the lower housing of the pump chamber in order to get large displacement. With the provided diaphragm air pump, it is possible to actively adjust the air quantity according to the requirement for fuel cell or a part-to-be-cooled, and it is also possible to reduce noise and power consumption compared with a conventional fan type cooler or air pumps.

Diaphragm air pump

A system and method for determining attitude using triaxial micro electro-mechanical accelerometer-magnetometer sensors. The triaxial accelerometer-magnetometer sensors measure the triaxial components of the local gravity and magnetic field along three sensing axes of the sensors. The misalignment of the components due to nonorthogonal triaxial assembling of the sensors is estimated via performing three optical alignments and is further compensated in the sensing outputs. A micro-cube with three orthogonal coated mirrors is fixed on the circuit board of the system for implementing the optical alignments. The compensated sensing components are processed to figure out the attitude using Orientation Cosine Conversion of the local gravity and magnetic field. The computation for determining the attitude is based on the inverse tangent of the ratio of the processed components, which is more precise than the computation using the absolute values of the components.

Micro azimuth-level detector based on micro electro-mechanical systems and a method for determination of attitude

Growing community of inventors

Beijing, China

Zhaoying Zhou