Xi'an Jiaotong University

Zhaojun Liu

Bian Tian

Zhongkai Zhang

Jiangjiang Liu

Yan Zhao Liu

Libo Zhao

Zhuangde Jiang

Cunfeng Wang

Qijing Lin

Peng Shi

Bingfei Zhang

Provided herein is a tungsten-rhenium composite thin film thermocouple based on a surface micropillar array with gas holes. A tungsten-rhenium thin film thermocouple is arranged on a surface of a flat alumina ceramic substrate. Two tails of the tungsten-rhenium thin film thermocouple are respectively connected to a lead wire. A surface of the tungsten-rhenium thin film thermocouple is arrayed with a plurality of micron alumina micropillars to form an alumina micropillar array. Air is filled between the micron alumina micropillars to form the gas holes. The flat alumina ceramic substrate, the tungsten-rhenium thin film thermocouple and the alumina micropillar array form a three-layered laminated structure.

Tungsten-rhenium composite thin film thermocouple based on surface micropillar array with gas holes

A thin-film thermocouple probe includes a columnar substrate, a tungsten-26% rhenium film and an indium oxide (InO) film. A side surface of the columnar substrate is provided with a first straight groove and a second straight groove. The tungsten-26% rhenium film is arranged on a front end surface of the columnar substrate and in the first straight groove. The indium oxide film is arranged on the front end surface of the columnar substrate and in the second straight groove. The indium oxide film on the front end surface of the columnar substrate is connected to the tungsten-26% rhenium film on the front end surface of the columnar substrate. A first metal lead wire is connected to the tungsten-26% rhenium film, and a second metal lead wire is connected to the indium oxide film. A method of preparing the thin-film thermocouple probe is provided.

Thin-film thermocouple probe and method of preparing same

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Shaanxi, China

Zhaojun Liu