Other

Zenta Nanpei

Masanao Murata

Hiroaki Saeki

Tsuyoshi Tanaka

Keiichi Matsushima

Hiroyuki Oyobe

Toshiyuki Takaoka

A load port for semiconductor equipment includes a transporting apparatus,and/or a moving apparatus,for respectively transporting a carrier base,and moving a cover,, using a smaller force until the carrier base,and/or the cover,reaches a predetermined position that is at a predetermined distance from an opening,of the equipment. This position is at a distance where it is no longer possible to catch a hand or other object between the carrier base,or cover,and the semiconductor equipment. Then, the carrier base,and/or the cover,is transported or moved towards the opening,by the transporting apparatus,and/or moving apparatus,respectively transporting the carrier base,and/or moving the cover,towards the opening,to completely close the opening,using a larger force.

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Ise, Japan

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