Fuji Electric Co., Ltd.

Fuji Electric Device Technology Co., Ltd.

Zenchi Hayashi

Kazuo Matsuzaki

Masaharu Edo

Kazumi Takagiwa

Taku Furuta

A microminiature power converter includes a semiconductor substrate on which a semiconductor integrated circuit is formed, a thin film magnetic induction element, and a capacitor. The thin film magnetic induction element includes a magnetic insulating substrate, and a solenoid coil conductor in which a first conductor is formed on a first principal plane of the magnetic insulating substrate, a second conductor is formed on a second principal plane of the magnetic insulating substrate, and a connection conductor is formed in a through hole passing through the magnetic insulating substrate are connected. A relationship of a length L of the magnetic insulating substrate in a direction vertical to a magnetic field generated by the solenoid coil and a length d of the coil conductor is d&#x2267;L/2.

Microminiature power converter

On top of a silicon substrate, a polyimide film with a thickness of 10 &mgr;m is formed. On top of this, a magnetic thin film that is a polyimide film containing Fe fine particles and that has a thickness of 20 &mgr;m is formed. On top of this magnetic thin film, a patterned Ti/Au film and a Ti/Au connection conductor are formed. On top of this, a polyimide film with a thickness of 10 &mgr;m, and a Cu coil with a height 35 &mgr;m, width 90 &mgr;m, space 25 &mgr;m, and a polyimide layer that fills the spaces in the Cu coil are formed. On top of this, via a polyimide film with a thickness of 10 &mgr;m, a magnetic thin film that is a polyimide film containing Fe particles and that has a thickness of 20 &mgr;m is formed. This thin film inductor has a small alternating current resistance. The present invention provides a magnetic thin film that is well suited for mass production, can be manufactured easily, can be made into a thick film, has soft magnetic qualities, and is inexpensive. The present invention also provides a magnetic component that uses this magnetic thin film, manufacturing methods for these, and a power conversion device.

Growing community of inventors

Nagano, Japan

Zenchi Hayashi