Monolithic 3d Inc.

Other

Zeev Wurman

Zvi Or-Bach

Deepak Chandra Sekar

Brian Cronquist

Israel Beinglass

Jan Lodewijk De Jong

A method of designing a 3D Integrated Circuit including: partitioning at least one design into at least two levels, a first level and a second level, where the first level includes first transistors, where the second level includes second transistors and is disposed on top of the first level; levels connection pads (LCPs) disposed between the first level and second level; providing placement of the LCPs; performing a placement of the first level using a placer program executed by a computer, where the placement of the first level is based on the placement of the LCPs, where the placer is part of a Computer Aided Design (CAD) tool, where the first level includes first routing layers; performing a routing of the first level by routing layers using a router executed by a computer, where the router is a part of the CAD tool or a part of another CAD tool.

Automation methods for 3D integrated circuits and devices

A 3D semiconductor memory, the memory including: a first level including first memory cells, first transistors, and a first control line, where the first memory cells each include one of the first transistors; a second level including second memory cells, second transistors, and a second control line, where the second memory cells each include one of the second transistors, where the second level overlays the first level, where the second control line and the first control line have been processed following the same lithography step and accordingly are self-aligned, where the first control line is directly connected to each source or drain of at least five of the first transistors, and where the second control line is directly connected to each source or drain of at least five of the second transistors; and an oxide layer disposed between the first control line and the second control line.

3D semiconductor memory device and structure

A method of designing a 3D Integrated Circuit including: partitioning at least one design into at least two levels, a first level and a second level; levels connection pads between the first level and the second level; providing placement data of the second level; performing a placement of the first level using a placer executed by a computer, where the placement of the first level is based on the placement of the levels connection pads, where the placer is part of a Computer Aided Design (CAD) tool, where the first level includes first routing layers; performing a routing of the first level by routing layers using a router executed by a computer, where the router is a part of the CAD tool or a part of another CAD tool, where at least one metal routing layer is in-between the first level first transistors and the second level second transistors.

A method of designing a 3D Integrated Circuit, the method including: partitioning at least one design into at least two levels, a first level and a second level; providing placement data of the second level; performing a placement of the first level using a placer executed by a computer, where the placement of the first level is based on the placement data, where the placer is part of a Computer Aided Design (CAD) tool, and where the first level includes first routing layers; and performing a routing of the first level by routing layers using a router executed by a computer, where the router is a part of the Computer Aided Design (CAD) tool or a part of another CAD tool.

A method of designing a 3D Integrated Circuit, the method including: partitioning at least one design into at least two levels, a first level and a second level; providing connections placement data of the second level, where the connections include planned connections between the first level and the second level; performing a placement of the first level using a placer executed by a computer, where the placement of the first level is based on the connections placement data, where the placer is part of a Computer Aided Design (CAD) tool, and where the first level includes first routing layers; and performing a routing of the first level by routing layers using a router executed by a computer, where the router is a part of the Computer Aided Design (CAD) tool or a part of another CAD tool.

A method of designing a 3D Integrated Circuit including: partitioning at least one design into at least two levels, a first level and a second level, where the first level includes logic and the second level includes memory; and then obtaining a first placement of at least portion of the second level, where the first placement includes placement of a first memory array, where the Circuit includes a plurality of connections between the first level and the second level; and performing a second placement, where performing the second placement includes placing the first logic circuit based on the first placement of the first memory array, where the performing a second placement includes using a placer executed by a computer, where the placer is a part of a Computer Aided Design tool, and where the logic includes a first logic circuit configured to read data from the first memory array.

A method of designing a 3D Integrated Circuit including: partitioning at least one design into at least a first and a second level, where the first level includes logic and the second level includes memory; then performing a first placement of the second level using a placer executed by a computer, the placer is a part of a Computer Aided Design tool, where the 3D Integrated Circuit includes a plurality of connections between the first level and the second level; and performing a second placement of the first level based on the first placement, where memory includes a first memory array, the logic includes a first logic circuit configured so as to write data to first memory array. Performing the first placement includes placing the first memory array, and where performing the second placement includes placing the first logic circuit based on the first placement of the first memory array.

Automation for monolithic 3D devices

A method of designing 3D Integrated Circuits including: partitioning at least one design into at least two levels, a first and second level, where the first level includes logic, the second level includes memory; and then receiving a first placement of at least portion of the second level, where the first placement includes a placement of a first memory array, where the Circuit includes a plurality of connections between the first level and second level; performing a second placement of the first level based on the first placement, the performing a second placement includes using a placer computer executed, where the placer is a part of a Computer Aided Design tool, where the logic includes a first logic circuit configured to write data to the first memory array, and where performing the second placement includes placing the first logic circuit based on the first placement of the first memory array.

A method to form a 3D integrated circuit, the method including: providing a first wafer including a first crystalline substrate, a plurality of first transistors, and first copper interconnecting layers, where the first copper interconnecting layers at least interconnect the plurality of first transistors; providing a second wafer including a second crystalline substrate, a plurality of second transistors, and second copper interconnecting layers, where the second copper interconnecting layers at least interconnect the plurality of second transistors; and then performing a face-to-face bonding of the second wafer on top of the first wafer, where the face-to-face bonding includes copper to copper bonding; and thinning the second crystalline substrate to a thickness of less than 5 micro-meters.

Method to form a 3D integrated circuit

A method of designing a 3D Integrated Circuit, including: performing partitioning to at least a logic strata, the logic strata including logic, and to a memory strata, the memory strata including memory; then performing a first placement of the memory strata using a 2D placer executed by a computer, where the 2D placer includes a Computer Aided Design tool, where the 3D Integrated Circuit includes a plurality of connections between the logic and the memory strata; and performing a second placement of the logic strata based on the first placement, where the memory includes a first memory array, where the logic includes a first logic circuit connected so to write data to the first memory array, where the first placement includes placement of the first memory array, and where the second placement includes placement of the first logic circuit based on the placement of the first memory array.

A method of designing a 3D Integrated Circuit, the method including: performing partitioning to at least a logic strata, the logic strata including logic, and to a memory strata, the memory strata including memory; then performing a first placement of the memory strata using a 2D placer executed by a computer, where the 2D placer is a Computer Aided Design (CAD) tool for two-dimensional devices, where the 3D Integrated Circuit includes a plurality of connections between the logic strata and the memory strata; and performing a second placement of the logic strata based on the first placement, where the memory includes a first memory array, where the logic includes a first logic circuit controlling the first memory array, where the first placement includes placement of the first memory array, where the second placement includes placement of the first logic circuit based on the placement of the first memory array.

A method of designing a 3D Integrated Circuit, the method including: performing partitioning to at least a logic strata, the logic strata including logic, and to a memory strata, the memory strata including memory; then performing a first placement of the memory strata using a 2D placer executed by a computer, where the 2D placer is a Computer Aided Design (CAD) tool for two-dimensional devices, where the 3D Integrated Circuit includes through silicon vias for connection between the logic strata and the memory strata; and performing a second placement of the logic strata based on the first placement, where the memory includes a first memory array, where the logic includes a first logic circuit controlling the first memory array, where the first placement includes placement of the first memory array, and the second placement includes placement of the first logic circuit based on the placement of the first memory array.

A 3D semiconductor device, including: a first level including a single crystal layer, a plurality of first transistors, and a first metal layer, forming memory control circuits; a second level overlaying the single crystal layer, and including a plurality of second transistors and a plurality of first memory cells; a third level overlaying the second level, and including a plurality of third transistors and a plurality of second memory cells; where the second transistors are aligned to the first transistors with less than 40 nm alignment error, where the memory cells include a NAND non-volatile memory type, where some of the memory control circuits can control at least one of the memory cells, and where some of the memory control circuits are designed to perform a verify read after a write pulse so to detect if the at least one of the memory cells has been successfully written.

3D semiconductor device and structure

A method of designing a 3D Integrated Circuit, the method comprising: performing partitioning to at least a logic strata comprising logic and a memory strata comprising memory; then performing a first placement of said logic strata using a 2D placer executed by a computer, wherein said 2D placer is a Computer Aided Design (CAD) tool for two-dimensional devices, wherein said 3D Integrated Circuit comprises through silicon vias for connection between said logic strata and said memory strata; and performing a second placement of said memory strata based on said first placement, wherein said memory comprises a first memory array, wherein said logic comprises a first logic circuit controlling said first memory array, wherein said first placement comprises placement of said first logic circuit, and wherein said second placement comprises placement of said first memory array based on said placement of said first logic circuit.

A method of designing a 3D Integrated Circuit, the method including: performing partitioning to at least a logic strata including logic and a memory strata including memory; then performing a first placement of the logic strata using a 2D placer executed by a computer, where the 2D placer is a Computer Aided Design (CAD) tool for two-dimensional devices; where the 3D Integrated Circuit includes through silicon vias for connection between the logic strata and the memory strata; and performing a second placement of the memory strata based on the first placement, where the logic includes at least one decoder representation for the memory, where the at least one decoder representation has a virtual size with width of contacts for the through silicon vias, and where the performing a first placement includes using the decoder representation instead of an actual memory decoder.

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Palo Alto, CA, United States of America

Zeev Wurman