L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des

V.g. Elemental Limited

Yves Marot

Alain Mail

Catherine Ronge

Eric Coffre

Robert Hutton

Martine Bridenne

A device for regulating the flow of gases having substantially different molar masses, comprising

Device for regulating the flow of gases having substantially different

A method of delivering a pure gas charged with a predetermined quantity of at least one gaseous impurity to an apparatus, comprising the steps of mixing at least two different auxiliary gases, including the impurity to form a mixture, diluting a sampled quantity of the mixture in the pure gas in a predetermined manner, delivering the pure gas charged with the impurity to the apparatus, wherein the auxiliary gases are stored in a reservoir in the form of a mixture of known composition, most of the auxiliary gases in the mixture having volume concentrations substantially of the same order of magnitude.

Method and device for delivering a pure gas charged with a predetermined

A selection device for delivering one of two gases to an apparatus includes an apparatus having an inlet and an outlet, and a gas delivery line connected to the inlet of the apparatus. A first feed line and a second feed line for respectively feeding a first and a second gas are provided. A first purge line and a second purge line are also provided, the first feed line being connected to the first purge line and the second feed line being connected to the second purge line. A common connection line connects the first and the second feed lines to the gas delivery line. An additional purge line is connected to the outlet of the apparatus. A first element, a second element, and a third element for creating a pressure drop are disposed in the first, the second, and the additional purge lines, respectively, the first element for creating a pressure drop and the third element for creating a pressure drop being flow-regulating elements, the second element for creating a pressure drop being a backpressure regulator. The common gas delivery line is only connected to the common connection line and to the apparatus.

Selection device for providing one or the other of two gases to an

A device for delivering one of a plurality of gases to an apparatus includes at least two valves. Each valve includes a first conduit permanently connected by one end thereof to an associated sampling line and, by another end thereof, to an associated purge line. Each valve includes a second conduit and an actuator which can be switched between bringing the first conduit into communication with the second conduit and a position for isolating the first conduit from the second conduit. At least the second conduit is free of flow-stagnation volumes. The second conduits of the valves are placed in series in a common gas delivery line for delivering gas to the apparatus. The end of the common gas delivery line opposite the apparatus emerges in an associated purge line. Each purge line passes through an element for creating a pressure drop. A use of the device is as a feed for trace impurities analyzer an atmospheric pressure ionization mass spectrometer or a particles analyzer.

Device for delivering any one of a plurality of gases to an apparatus

A device for delivering one of a plurality of gases to an apparatus includes at least two valves. Each valve includes a first conduit permanently connected by one end thereof to an associated sampling line and, by another end thereof, to an associated purge line. Each valve includes a second conduit and an actuator which can be switched between bringing the first conduit into communication with the second conduit and a position for isolating the first conduit from the second conduit. At least the second conduit is free of flow-stagnation volumes. The second conduits of the valves are placed in series in a common line for delivering gas to the apparatus. The end of the common line opposite the apparatus emerges in an associated purge line. Each purge line passes through an element for creating a pressure drop. A use of the device is as a feed for an ionization mass spectrometer.

A device for supplying gas to an analyzer for measuring traces of impurities in the gas comprising: (i) a source of pure gas; (ii) a set of at least first and second bypass gas lines, arranged in parallel and fed by the source of pure gas, the first and second bypass gas lines having a common gas entry and a common gas exit, the common gas exit being in communication with a feed line of the analyzer through a common gas exit line; (iii) a device for charging a gas in the first bypass gas line with a predetermined quantity of at least one impurity for forming a standardizing gas; (iv) a restriction disposed in each of the first and second bypass gas lines, each restriction being calibrated to divide the flow of pure gas feeding the set between the first and second bypass lines in a predetermined ratio; and (v) a flow regulator for regulating the flow of pure gas feeding the set of bypass gas lines, disposed between the source of pure gas and the common gas entry of the first and second bypass gas lines, wherein the first and second bypass gas lines, between the common gas entry and the calibrated restriction are devoid of any pressure-measuring member.

Device for supplying gas to an analyzer of traces of impurities in a gas

A novel process for supplying a gas to an analyzer for measuring traces of impurities in the gas is provided. The process includes the steps of supplying the analyzer with: (i) a gas to be analyzed; (ii) a pure gas; and (iii) a standardizing gas obtained by dilution of one or more impurities in the pure gas as follows: (A) dividing a flow of pure gas into a set of at least first and second bypass lines, arranged in parallel, each of the bypass lines having an entry including a calibrated restriction, the flow of pure gas into the set of bypass lines being regulated by a flow regulator placed upstream of the set, (B) charging the pure gas of the first bypass line with a predetermined quantity of at least one impurity to obtain, after dilution with the pure gas of the second bypass line, a flow of the standardizing gas, which is directed from an exit of the set of bypass lines towards the analyzer along a feed line.

Process and device for supplying gas to an analyzer of traces of

Improvement to the process of elementary analysis of a specimen by high frequency inductively coupled plasma mass spectrometry, by means of an apparatus including a torch for producing plasma from a plasma producing medium and for injecting the specimen in this plasma and an interface for taking a sample in the specimen, comprising two consecutive conical members disposed along the same axis except that the conical members have angles with different apices and are each provided with an axial orifice enabling a fraction of the specimen to be analyzed to pass therethrough. According to the invention, a given quantity of a make-up gas is added to the specimen which is injected into the plasma, the make-up gas having a high heat producing power, so as to raise the temperature of the plasma for locally heating the sampling conical members thereby preventing the components of the specimen which are present in the plasma from depositing on the conical members. Preferably, the sampling conical members (18,19) are made of an alloy of niobium, hafnium, titanium.

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Buc, France

Yves Marot