Mitsubishi Electric Corporation

Yuzuru Tadokoro

Tatsuya Yamamoto

Junichi Nishimae

Koji Funaoka

Takuya Kawashima

Yoshiharu Kurosaki

Masayuki Saiki

Masashi Naruse

Hiromasa Mihara

A laser amplification device includes a laser oscillator that includes a first laser active medium including a mixed gas containing carbon dioxide gas and emits pulsed laser light with the full width at half maximum of between 15 ns to 200 ns, and a laser amplifier that includes a second laser active medium including a mixed gas containing carbon dioxide gas through which the pulsed laser light emitted from the laser oscillator passes to be shortened to pulsed laser light with the full width at half maximum of between 5 ns and 30 ns to be output.

Laser amplification device and extreme ultraviolet light generation apparatus

A laser apparatus includes a laser oscillator; an acousto-optic modulation unit including a first acousto-optic modulator that diffracts a laser beam from the laser oscillator when a first ultrasonic wave is applied and a second acousto-optic modulator that diffracts a higher order beam output from the first acousto-optic modulator when a second ultrasonic wave is applied; and an amplifier that amplifies the laser beam from the acousto-optic modulation unit, a propagation direction of the first ultrasonic wave relative to a diffracted direction of the higher order beam emitted from the first acousto-optic modulator and a propagation direction of the second ultrasonic wave relative to a diffracted direction of a higher order beam emitted from the second acousto-optic modulator being different.

Laser apparatus and laser machining apparatus

A gas laser device includes a shielding plate that is a first shielding member, and a shielding plate that is a second shielding member. The first shielding member includes a first opening, and a second opening. A laser beam that is to be propagated to discharge regions passes through the first opening. The laser beam that has taken a round trip through the discharge regions after passing through the first opening passes through the second opening. The second shielding plate faces the first shielding member the discharge regions located therebetween. The shielding plate includes an opening that is a third opening. The laser beam that has been propagated through the first opening and the discharge regions, and the laser beam that is to be propagated to the second opening through the discharge regions pass through the third opening. A plane shape of the third opening includes a rectilinear segment.

Gas laser device

Growing community of inventors

Tokyo, Japan

Yuzuru Tadokoro