Shinko Electric Company, Ltd.

Nissan Motor Company Limited

Yuzo Takakado

Hitoshi Kawano

Takumi Mizokawa

Makoto Omori

Kazumichi Kato

Katsuyoshi Nakano

Tetsuyuki Kimura

Yushi Sato

Toshio Miki

Kazuo Okubo

Masami Morita

Nobuhiro Saito

Hideki Tamura

Hirosuke Imabayashi

Hirohiko Murata

Tomoyuki Matsunaga

Takumi Yoshida

Hirotaka Kumakura

Tetsunari Kobayakawa

Kenji Yamaguchi

The present invention provides an electric generator for achieving the cost reduction of the electric generator itself from the view point of the structure of the electric generator, and the cost reduction of the generation of electricity from the view point of the performance of the electric generator, and a power supply equipment for use in this electric generator.

Generator and power supply for use therein

A wafer conveyance system is described for transporting one or more wafers that undergo, while being transported, different processes at a plurality of wafer processing apparatuses inside which one or more wares are processed. A hermetically closed chamber is provided that defines an isolated environment inside which a controlled atmosphere. At least one guide path is provided inside the hermetically closed chamber. At least one mobile element is movable inside the hermetically closed chamber along the at least one guide path to transport one or more wafers from one wafer processing apparatus to another. A plurality of position sensors that detect positions of the at least one mobile element are deployed along each of the at least one guide path in such a manner that they are deployed at intervals close together when near the wafer processing apparatuses and deployed at wider intervals elsewhere. In another aspect, the guide rails may be constructed of a plurality of connectable rail units. Because the guide rail can be disconnected and/or connected between rail units having position sensors, rearrangement and/or reattachment of the plurality of position sensors is not necessary when changing a configuration and/or extending the layout of the guide rail.

Conveyance system

Wafer processing apparatus A-Z for performing processes A-Z on a wafer are arranged in a row. A chamberis formed parallel to these wafer processing apparatus, and a guide railis provided inside the chamber. A mobile elementdriven by means of a linear motor is provided on the guide rail, and a wafer transfer robotcapable of exchanging a wafer between the wafer processing apparatus is mounted on the mobile element. With this structure, the wafer transfer robotexchange wafers between wafer processing apparatus to perform each process on the wafers until the wafers are conveyed to the wafer processing apparatus Z.

An engine-operated generator system utilizes the switching elements of an inverter transformation circuit to accomplish starting. The starter circuit includes a battery, one electrode of which is connected to one terminal of a smoothing capacitor connected between the DC terminals of the inverter transformation circuit in such a manner that the electrode and the terminal are of the same polarity. The other electrode is connected to one of the output terminals of an AC generator system through a switch which is closed to start the engine, and which is connected to a reactor forming an LC circuit. In starting the engine, the rectifier circuit is driven in an inverter transformation mode, one of the switching elements in the inverter transformation circuit which is connected between the reactor and the one terminal of the smoothing capacitor being driven in a chopper mode. The inverter transformation circuit is formed by bridge-connecting switching elements each having a flywheel diode. The same starting circuit may be used in connection with a DC generator, with or without the inclusion of a smoothing capacitor at the output of the DC generator.

Engine-operated generator system

An engine driven generator having an engine, a three-phase synchronous generator to be driven by the engine, a direct current power supply for actuating the engine, a direct current/alternating current power supply converter for converting a direct current power of the direct current power supply to an alternating current power and supplying the alternating current power to the three-phase synchronous generator:

Engine driven generator

Growing community of inventors

Aichi, Japan

Yuzo Takakado