Olympus Optical Company, Ltd.

Yuzo Nakamura

Fumio Uchino

Terumasa Morita

Soji Yamamoto

Nobuo Fujisaki

Hiroyuki Okahira

Mitsugu Sakai

Hitoshi Tateoka

Yasushi Satoh

Takao Okada

Hiroshi Kajimura

Hirofumi Miyamoto

Koichi Karaki

Kiyoshi Fujii

Tsugiko Takase

Shuzo Mishima

Masahiro Ohno

Hiroko Ohta

Junichi Ishibashi

Kanae Nakasato

Toshiaki Matsuzawa

Yoshimitsu Enomoto

Jun-ichi Ishibashi

An apparatus for inspecting a substrate includes a substrate holding member for holding a substrate to be inspected, a driving mechanism for raising the substrate holding member to a predetermined angle or less, a position coordinate detecting section provided at side edge of the substrate in at least two directions for detecting coordinates of a defect present in the substrate, an observation system supporting section provided for supporting a micro observation system and moving on the surface of the substrate, and a controlling section for controlling of the movement of the micro observation system of the observation system supporting section to correspond to a defect present in the substrate, on the basis of the position coordinates of the defect detected by the position coordinate detecting section.

Apparatus for inspecting a substrate

The apparatus for inspecting a substrate of the present invention comprises substrate holding member for holding a substrate to be inspected, a driving mechanism for raising the substrate holding member to a predetermined angle or less, a position coordinate detecting section provided at side edge of the substrate in at least two directions, for detecting coordinates of a defect present in the substrate, an observation system supporting section provided for supporting a micro observation system and moving on the surface of the substrate, and a controlling section for controlling of the movement of the micro observation system of the observation system supporting section to correspond to a defect present in the substrate, on the basis of the position coordinates of the defect detected by the position coordinate detecting section.

An apparatus for inspecting a substrate includes a substrate holding member for holding a substrate to be inspected, a driving mechanism for raising the substrate holding member to a predetermined angle or less, a position coordinate detecting section provided at side edge of the substrate in at least two directions, for detecting coordinates of a defect present in the substrate, an observation system supporting section provided for supporting a micro observation system and moving on the surface of the substrate, and a controlling section for controlling of the movement of the micro observation system of the observation system supporting section to correspond to a defect present in the substrate, on the basis of the position coordinates of the defect detected by the position coordinate detecting section.

An atomic force microscope comprises a probe having a sharply-pointed tip end. The probe is supported on the free end portion of a cantilever and is close to the surface of a specimen. When an interatomic force is produced, the cantilever is deformed, and the probe is displaced. The displacement of the probe is detected by an optical system. A light beam emitted from a light source is collimated by a lens, and reflected by a polarized beam-splitter, and also by a half-mirror. Then, the light beam passes through a quarter wavelength plate and an objective lens, such that the light is converged on the cantilever. The reflected light beam from the cantilever returns along the same optical path and passes through the splitter. The light beam is divided into two light beams at the splitter. These two light beams are reflected by respective prisms and are then incident on respective photodetectors. These photodetectors detect the displacement of the probe.

Atomic force microscope

Ultrasonic microscope

A microscope having an optical head and an additional head is disclosed. A slide plate on which the additional head and optical head are arranged in such a manner that they are separated by a predetermined spacing in the Y direction is slidably secured to an arm of the microscope. Under such a construction, an observation by a raster image and an optical observation by a optical image can be performed precisely for the same region of a specimen by moving the additional head and optical head integrally by a distance substantially equal to the spacing by means of the slide plate.

Microscope having an optical head and an additional head

An ultrasonic microscope having an ultrasonic head and an optical head is disclosed. A slide plate on which the ultrasonic head and optical head are arranged in such a manner that they are separated by a predetermined spacing in Y direction is slidably secured to an arm of the ultrasonic microscope. Under such a construction, an ultrasonic observation by an ultrasonic raster image and an optical observation by an optical image can be performed precisely for the same region of a specimen by moving the ultrasonic head and optical head integrally by a distance substantially equal to the spacing by means of the slide plate.

A mechanism for attaching an ultrasonic head of an ultrasonic microscope to a vibration shaft of a vibrator is disclosed. A first connector half to which an R.F. cable is connected is fixedly arranged to the vibration shaft and a second connector half having the ultrasonic head coupled therewith is detachably attached to the first connector half, so that an exchange of the ultrasonic head can be performed in an easy and swift manner without affecting the position and characteristics of the R.F. cable.

Mechanism for attaching ultrasonic head of ultrasonic microscope

Growing community of inventors

Ina, Japan

Yuzo Nakamura