Illinois Tool Works Inc.

Eion Energy Corporation

Yuyan Luo

Bradley Scott Withers

Erik Scott Nelson

Brent Allan Best

Qingjun Zhao

Provided is disclosure for hybrid material post-CMP brushes and methods for forming the same. Embodiments of a hybrid material post-CMP brush may comprise at least two layers, where the hybrid brush is used to clean various surfaces, such as surfaces of semiconductor substrates. An example hybrid brush for cleaning a surface includes a mandrel, a molded first layer formed about the mandrel, where the molded first layer comprises a first material, and a molded second layer surrounding the molded first layer, where the molded second layer comprises a second material.

Hybrid material post-CMP brushes and methods for forming the same

Composite fuels for hydrogen generation include materials that endothermically release hydrogen, materials that exothermically release hydrogen, and additives to promote endothermic reaction and to inhibit exothermic reaction.

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El Dorado Hills, CA, United States of America

Yuyan Luo