Canon Kabushiki Kaisha

Yuya Nishikawa

Yoshiyuki Kuramoto

Provided is a measuring apparatus which includes an imaging device configured to image an object to obtain image data and a processor configured to process the image data to recognize a region of the object. The processor is configured to perform feature extraction on the image data to obtain first feature data, perform projection of a three-dimensional model of the object, whose region is recognized based on the image data, onto a predetermined surface and perform the feature extraction on image data obtained by the projection to obtain second feature data, and perform determination of whether there is an unrecognized object based on the first feature data and the second feature data.

Measuring apparatus, measuring method, and article manufacturing method

The present invention provides a measurement apparatus for measuring one of a position and an attitude of a measurement target, including an image sensor including one pixel unit in which a plurality of pixels adjacent to each other are arranged in a matrix and configured to capture the measurement target illuminated with a pattern light of a first wavelength and a light of a second wavelength and obtain a first image corresponding to the pattern light of the first wavelength and a second image corresponding to the light of the second wavelength, and an optical member configured to separate the pattern light of the first wavelength and the light of the second wavelength and make one of the pattern light of the first wavelength and the light of the second wavelength enter each pixel of the one pixel unit.

Measurement apparatus

A measurement apparatus includes: a vibration detection surface which has a set relative position with respect to a test surface, and is irradiated with a part of the measurement light; an image sensor configured to sense, together with a first interference fringe generated by interference between reference light from a reference surface and measurement light from the test surface, a second interference fringe generated by interference between light from the vibration detection surface and the reference light; and a processor configured to obtain a relative vibration between the reference surface and the test surface by using data of the sensed second interference fringe, and obtain the shape of the test surface by using the obtained relative vibration and data of the sensed first interference fringe.

Growing community of inventors

Utsunomiya, Japan

Yuya Nishikawa