Hitachi-high-technologies Corporation

Yuya Isomae

Takehiro Hirai

Yohei Minekawa

Junko Konishi

Makoto Ono

Yuji Takagi

Yuko Otani

Tomohiro Funakoshi

Tsunehiro Sakai

Nobuhiko Kanzaki

Takashi Nobuhara

Miyuki Fukuda

Fumiaki Endo

Kaori Yaeshima

A defect observation device detects a defect with high accuracy regardless of a defect size. One imaging configuration for observing an observation target on a sample is selected from an optical microscope, an optical microscope, and an electron microscope, and an imaging condition of the selected imaging configuration is controlled.

Defect observation device

Disclosed is a technique wherein an object that requires adjustment in order to increase the reliability of automatic classification can be easily identified. A device () for adjusting classification classifies defects into a first class group according to the feature amount of the defects that are obtained from image data obtained from an electron microscope (), and classifies the defects into a second class group according to the feature amount of the defects classified into the first class group. And, the device () for adjusting the classification calculates classification performance by comparing the defects that have been classified into the second class group, and outputs the calculated classification performance in a predetermined display format to an output unit ().

Device for classifying defects and method for adjusting classification

The objective is to improve a classification standard. Classification standard data, in which is registered image data information that is the standard when image data is classified, and classification data, in which is registered image data information that is the result when newly input image data is classified using the classification standard data, are stored in a storage unit. An image classification device is characterized in that when any image data information of the image data that is registered in the classification data is selected by means of an input unit, and an instruction to additionally register the selected image data information in the classification standard data is input by means of the input unit, the selected image data information is additionally registered in the classification standard data.

Image classification standard update method, program, and image classification device

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Hitachinaka, Japan

Yuya Isomae