Ndk Saw Devices Co., Ltd.

Yuya Hiratsuka

Kazuhiro Hirota

A surface acoustic wave device includes a quartz layer, a piezoelectric layer, and an Inter Digital Transducer. A rotation in a right-screw direction is assumed as a +-rotation. A three-dimensional coordinate system formed by an x1-axis, a y1-axis, and a z1-axis respectively matching an X-axis, a Y-axis, and a Z-axis as crystallographic axes of a quartz-crystal is rotated from +125.25&#xb0; in a range of &#xb1;3&#xb0; with the x1-axis as a rotation axis. Subsequently, the three-dimensional coordinate system is rotated from +45&#xb0; in a range of &#xb1;2&#xb0; with the z1-axis as the rotation axis. Subsequently, the three-dimensional coordinate system is rotated from &#x2212;45&#xb0; in a range of &#xb1;2&#xb0; with the x1-axis as the rotation axis. The quartz layer is cut along a surface as a sectional plane perpendicular to the z1-axis. The quartz layer has a propagation direction of the surface acoustic wave in a direction parallel to the x1-axis.

Surface acoustic wave device

A surface acoustic wave device includes a quartz layer, an amorphous silicon oxide layer, a piezoelectric layer, and an Inter Digital Transducer. The amorphous silicon oxide layer is laminated on the quartz layer. The piezoelectric layer is laminated on the amorphous silicon oxide layer. The Inter Digital Transducer is formed on the piezoelectric layer. The Inter Digital Transducer excites a surface acoustic wave on the piezoelectric layer. Assuming that the surface acoustic wave has a wavelength &#x3bb;,

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Saitama, Japan

Yuya Hiratsuka