The 13th Research Institute of China Electronics Technology Group Corporation

Yuwei Zhai

Aihua Wu

Wei Wang

Hao Li

Chen Ding

Xiaodong Jing

Yan Liu

Baicheng Sheng

A three-dimensional displacement compensation method is provided. The method includes an obtaining step, a transforming step, a first determining step, a first calculating step and a compensating step. The obtaining step includes obtaining a current image of a measured element captured by a microscopic thermoreflectance thermography device. The transforming step includes two sub-steps. One sub-step uses Fourier transform to calculate a reference image to obtain a first result, and the other sub-step uses Fourier transform to calculate the current image to obtain a second result. The first determining step includes determining a peak point coordinate and a fitting diameter of a point spread function of an optical system of the device. The first calculating step includes calculating a three-dimensional displacement of the position to be compensated relative to the reference position. The compensating step compensates the position to be compensated.

Three-dimensional displacement compensation method for microscopic thermoreflectance thermography and control device

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Shijiazhuang, China

Yuwei Zhai