Canon Semiconductor Equipment, Inc.

Yuusuke Suzuki

Hitoshi Ishihama

Masakazu Nagata

A cooling apparatus includes a compressor, a first flow path and a second flow path branched from a branch point, a condenser disposed downstream of the branch point in the first flow path, a first decompressor disposed downstream of the condenser, a plurality of evaporators disposed downstream of the first decompressor and connected in series, a second decompressor disposed downstream of the branch point in the second flow path, a detection unit, and a control unit. The second flow path includes a hot-gas flow path configured to connect an outlet of the second decompressor and a meeting point with the first flow path. The control unit controls a degree of opening of the second decompressor depending on the temperature detected by the first temperature-detection unit and controls a degree of opening of the first decompressor depending on the temperature and/or the pressure detected by the detection unit.

Cooling apparatus having multiple evaporators for cooling objects having different amounts of heat generation, exposure apparatus including cooling apparatus, and industrial apparatus including cooling apparatus

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Ibaraki, Japan

Yuusuke Suzuki