Jsr Corporation

Yuusuke Ootsubo

Kazunori Sakai

Ryuichi Serizawa

A composition includes: a metal compound including a ligand; and a solvent. The ligand is derived from a compound represented by formula (1). L represents an oxygen atom or a single bond; Rrepresents a substituted or unsubstituted monovalent hydrocarbon group having 1 to 10 carbon atoms; Rand Reach independently represent a hydrogen atom or a substituted or unsubstituted monovalent hydrocarbon group having 1 to 10 carbon atoms, or Rand Rbind with each other and represent an alicyclic structure having 3 to 20 ring atoms together with the carbon atom to which Rand Rbond, or Rand either Ror Rbind with each other and represent a lactone ring structure having 4 to 20 ring atoms or a cyclic ketone structure having 4 to 20 ring atoms together with the atom chain to which Rand either Ror Rbond.

Composition, film, method of forming film, method of forming pattern, method of forming organic-underlayer-film reverse pattern, and method of producing composition

Growing community of inventors

Tokyo, Japan

Yuusuke Ootsubo