Kabushiki Kaisha Toshiba

Toshiba Memory Corporation

Kioxia Corporation

Rohm Co., Ltd.

Seiko Epson Corporation

Renesas Electronics Corporation

Renesas Technology Corp.

Hitachi-kokusai Electric Inc.

Yuuichi Kamimuta

Masato Koyama

Akira Nishiyama

Tsunehiro Ino

Reika Ichihara

Yoshinori Tsuchiya

Masumi Saitoh

Kunifumi Suzuki

Akira Takashima

Masamichi Suzuki

Yasushi Nakasaki

Masahiro Koike

Yusuke Higashi

Marina Yamaguchi

Shoichi Kabuyanagi

Shosuke Fujii

Katsuyuki Sekine

Tsutomu Tezuka

Hidenori Miyagawa

Toshinori Numata

Kunihiko Iwamoto

Takayuki Ishikawa

Arito Ogawa

Daisuke Matsushita

Keiji Ikeda

Toshihide Nabatame

Chika Tanaka

Akio Kaneko

Takashi Yamauchi

Hiromi Ito

Yukimune Watanabe

Shinji Migita

Riichiro Takaishi

Hiromichi Kuriyama

Ayaka Suko

Keiko Sakuma

Yoko Yoshimura

Kiyoe Furuse

A memory cell includes: a core structure extending in a first direction orthogonal to a semiconductor substrate; a semiconductor layer extending in the first direction and in contact with the core structure; an insulating layer extending in the first direction and in contact with the semiconductor layer; a ferroelectric layer extending in the first direction and in contact with the insulating layer; a first electrode extending in a second direction orthogonal to the first direction and in contact with the ferroelectric layer; a second electrode adjacent to the first electrode in the first direction, extending in the second direction, and in contact with the ferroelectric layer; an insulating layer stacked in the first direction and disposed between the first and second electrodes; and an antiferroelectric layer disposed between the first and second electrodes, and in contact with the insulating layer and the ferroelectric layer.

Nonvolatile semiconductor memory and manufacturing method therefor

A memory device includes a first interconnect layer, a second interconnect layer, a phase-change layer, and an adjacent layer. The phase-change layer is disposed between the first interconnect layer and the second interconnect layer and configured to reversibly transition between a crystalline state and an amorphous state. The adjacent layer contacts the phase-change layer and comprises tellurium and at least one of titanium, zirconium, or hafnium.

Memory device

According to one embodiment, a memory device includes a memory cell including a resistance change memory portion and a switching portion, and a voltage applying circuit carrying out, at a time of writing data to the memory cell, an operation of applying a voltage of a first polarity to the memory cell and applying a first voltage to the memory cell, an operation of applying a voltage of a second polarity to the memory cell and applying a second voltage to the memory cell, an operation of applying a voltage of the first polarity to the memory cell and applying a third voltage to the memory cell, or an operation of applying a voltage of the second polarity to the memory cell and applying a fourth voltage to the memory cell.

A storage deviceincludes a phase change layercontaining tellurium, and a diffusion layercontaining at least one of germanium, silicon, carbon, tin, aluminum, gallium, and indium and disposed at a position adjacent to the phase change layer. The phase change layeris capable of changing between a first state and a second state different from each other in electric resistance. The phase change layeris in a crystal state in any of the first state and the second state. A length of the diffusion layerin a direction orthogonal to a z direction is shorter than a length of the phase change layerin the direction orthogonal to the z direction.

Storage device

A semiconductor memory device includes: a first semiconductor layer extending in a first direction; a first conductive layer and a second conductive layer that are arranged in the first direction and each opposed to the first semiconductor layer; a first insulating portion disposed between the first semiconductor layer and the first conductive layer, the first insulating portion containing oxygen (O) and hafnium (Hf); a second insulating portion disposed between the first semiconductor layer and the second conductive layer, the second insulating portion containing oxygen (O) and hafnium (Hf); and a first charge storage layer disposed between the first insulating portion and the second insulating portion, the first charge storage layer being spaced from the first conductive layer and the second conductive layer.

Semiconductor memory device

A semiconductor memory device of an embodiment includes: a semiconductor layer extending in a first direction; a first gate electrode layer; a second gate electrode layer provided apart from the first gate electrode layer in the first direction; and a gate insulating layer containing oxygen and at least one metal element of hafnium or zirconium, the gate insulating layer including a first region between the first gate electrode layer and the semiconductor layer, a second region between the first gate electrode layer and the second gate electrode layer, and a third region between the second gate electrode layer and the semiconductor layer, the first region including a crystal of an orthorhombic crystal system or a trigonal crystal system as a main constituent substance, and a distance between the second region and the semiconductor layer being larger than a distance between the first region and the semiconductor layer.

Semiconductor memory device having ferroelectric gate insulating layer

A memory device according to an embodiment includes a first conductive layer; a second conductive layer; a ferroelectric layer provided between the first conductive layer and the second conductive layer and containing hafnium oxide; a paraelectric layer provided between the first conductive layer and the ferroelectric layer and containing a first oxide; and an oxide layer provided between the paraelectric layer and the ferroelectric layer and containing a second oxide having an oxygen area density lower than an oxygen area density of the first oxide.

Provided is a storage device according to an embodiment including: a stacked body including gate electrode layers stacked in a first direction; a semiconductor layer provided in the stacked body and extending in the first direction; and a gate insulating film provided between the semiconductor layer and the gate electrode layer, the gate insulating film having a first region disposed between the gate electrode layer and the semiconductor layer and a second region disposed between the two first regions adjacent to each other in the first direction, the gate insulating film containing a hafnium oxide, in which a first thickness of the first region in the second direction from the semiconductor layer toward the gate electrode layer is smaller than a second thickness of the second region in the second direction.

Ferroelectric memory device

A semiconductor memory device of an embodiment includes a semiconductor layer; a gate electrode including a first portion, a second portion provided to be spaced apart from the first portion, and a spacer provided between the first portion and the second portion; and a first insulating layer provided between the semiconductor layer and the gate electrode and including a first region containing a ferroelectric, a ferrielectric, or an anti-ferroelectric, a second region containing a ferroelectric, a ferrielectric, or an anti-ferroelectric, and a boundary region provided between the first region and the second region. The first region is positioned between the first portion and the semiconductor layer, the second region is positioned between the second portion and the semiconductor layer, the boundary region is positioned between the spacer and the semiconductor layer, and the boundary region has a chemical composition different from that of the spacer.

A memory device according to an embodiment includes a first conductive layer, a second conductive layer, and a first layer provided between the first conductive layer and the second conductive layer and containing aluminum oxide that contains at least one first element selected from the group consisting of magnesium (Mg), silicon (Si), hafnium (Hf), tungsten (W), and ruthenium (Ru), and the aluminum oxide is a ferroelectric.

A semiconductor memory device according to one embodiment includes: a memory cell, the memory cell including a ferroelectric film; and a control circuit controlling the memory cell. Additionally, the control circuit determining whether the number of times of executions of a write process or an erase process on the memory cell has reached a predetermined number of times; and, if the number of times of executions has reached the predetermined number of times, executing a voltage application process in which a first voltage of a first polarity and a second voltage of a second polarity opposite to the first polarity are applied to the ferroelectric film.

According to one embodiment, a semiconductor memory device includes a first conductive member, a first semiconductor member, and a first stacked member provided between the first conductive member and the first semiconductor member. The first stacked member includes a first insulating film, a second insulating film provided between the first insulating film and the first semiconductor member, first and second layers. The first layer includes aluminum and nitrogen and is provided between the first and second insulating films. A first thickness of the first layer along a first direction is 3 nm or less. The first direction is from the first semiconductor member toward the first conductive member. The second layer contacts the first layer, includes silicon and nitrogen, and is provided at one of a position between the first layer and the second insulating film or a position between the first layer and the first insulating film.

Semiconductor memory device and method for manufacturing the same with increased storage capacity

Growing community of inventors

Yokohama, Japan

Yuuichi Kamimuta