Hamamatsu-photonics K.k.

Yuto Yanagihara

Hiroshi Kobayashi

Akio Suzuki

Yuuya Washiyama

Sayaka Takatsuka

An ion detector according to this embodiment has a structure for reducing influences of signal reflection or the like on an output signal. The ion detector comprises an electron multiplier, a signal output unit, a signal output terminal, and an AC coupler. The AC coupler is disposed on a signal line between the signal output unit and the signal output terminal, including a resin sheet and a pair of conductive sections facing each other with the resin sheet interposed therebetween. One conductive section is electrically connected to an output terminal of the signal output unit, and the other conductive section is electrically connected to the signal output terminal.

Ion detector

An electron multiplier includes an insulating substrate which includes an electrical wiring pattern and in which a through-hole is formed, an MCP arranged on one side of the through-hole of the insulating substrate and electrically connected to the electrical wiring pattern, a shield plate arranged in one side of the MCP and electrically connected to the MCP, an anode arranged on the other side of the through-hole and electrically connected to the electrical wiring pattern, and a signal readout terminal fixed to the insulating substrate for reading a signal from the anode. The shield plate is formed to include the MCP when viewed in a thickness direction. A through-hole exposing at least a portion of the MCP is formed in the shield plate. The insulating substrate, the MCP, the shield plate and the anode are fixed to each other to be integral.

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Hamamatsu, Japan

Yuto Yanagihara