Mitsubishi Heavy Industries Limited

Toshiba Memory Corporation

Yuto Takeuchi

Kenji Shiraishi

Sachiyo Ito

Hiromitsu Mashita

Taiga Uno

Hirotaka Ichikawa

Masahiro Miyairi

Hiroshi Yoshimura

Kazuyuki Hino

Shinichirou Ooki

A jig for assembling and extracting a blade root spring for fixing a rotor blade to a rotor includes: an extrusion mechanism for extruding the blade root spring or an extrusion rod pressed against the blade root spring; and a base plate to which the extrusion mechanism is fixed. The base plate is formed with a first groove for receiving a reaction force which is obtained when the extrusion mechanism extrudes the extrusion rod toward the blade root spring to extrude and assemble the blade root spring or to extract the blade root spring.

Jig for assembling and extracting blade root spring, and method for assembling and extracting blade root spring

According to one embodiment, a mask pattern correction system includes the following configuration. A stress analysis circuitry divides a layout of a circuit pattern formed using a design mask formed in accordance with mask design data into correction regions, and acquires a displacement amount from the regions. A correction value calculation circuitry calculates a displacement correction value from the displacement amount. A correction map generation circuitry generates a correction map based on a correction value difference of the displacement correction values. A mask position correction circuitry allocates the regions to a layout of the circuit pattern, performs displacement correction of a mask pattern on the design mask by the displacement correction values, and creates a correction mask based on the displacement correction.

Mask pattern correction system, and semiconductor device manufacturing method utilizing said correction system

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Kanagawa, Japan

Yuto Takeuchi