Horiba, Ltd.

Yutaka Saijo

Satoshi Ohashi

Kunio Otsuki

Kentaro Nishikata

Junichi Aoyama

Shigeru Kakinuma

An object of this invention is to make it easy to adjust a position of the energy beam to irradiate and a position of a focal point of a light collecting mirror part, and to prevent displacement of the light collecting part due to vibration with a simple arrangement. A sample measuring device in accordance with this invention is to measure light generated from a sample W by irradiating electron beams EB on the sample W, and comprises a electron optical column partthat converges the electron beams EB, and a light collecting mirror partthat is arranged between the electron optical column partand the sample W and that has an energy beam pathto pass the electron beams EB converged by the electron optical column partand to irradiate the electron beams EB on the sample W and a mirror facewhose focal point F is set on an axis of the energy beam pathand that collects the light L generated from the sample W by means of the mirror face, wherein the light collecting mirror partis supported by the electron optical column partso that the axis of the electron beams EB coincides with the focal point F.

Sample measuring device

A spectral ellipsometer includes a light incident optical system for focusing a incidence spot of polarized light of multi-wavelengths onto a sample surface. A detecting optical system receives the reflected light influenced by the sample surface so that the amount of change in an elliptical polarization will be characteristic of the sample surface. A spherical prism polarizer is employed in the light incident optical system having complimentary curved light incident and light exit surfaces to enable the focusing of the incident light so that each of the ray traces of the range of wavelengths are focused at the same position on the sample surface.

Growing community of inventors

Kyoto, Japan

Yutaka Saijo