Seiko Epson Corporation

Other

Yutaka Maruo

Susumu Inoue

Yo Takeda

Kazunobu Kuwazawa

Akihiko Ebina

Sanae Nishida

Yoshitaka Narita

A semiconductor device includes: a semiconductor element provided on a semiconductor layer; a light-blocking wall provided around the semiconductor element; and a wiring layer electrically coupled to the semiconductor element and extended from an aperture not having the light-blocking wall to an outside of the light-blocking wall; wherein the wiring layer has a pattern containing a first section positioned in the aperture and a second section which has a width not narrower than a width of the aperture by providing a branched portion intersecting with an extension direction of the wiring layer; and wherein a surface of the branched portion facing outside of the light-blocking wall includes thereon a convex part.

Semiconductor device

A semiconductor device including a nonvolatile memory element, the nonvolatile memory element, including:

Semiconductor device including nonvolatile memory having a floating gate electrode

A semiconductor device includes a semiconductor element that is set up on a semiconductor layer, a light shielding wall that is set up around the semiconductor element, a hole that is set up on the light shielding wall, and a wiring layer that is electrically connected to the semiconductor element and is drawn out through the hole to the outside of the light shielding wall. The wiring layer has a pattern including a first part that is located within the hole and a second part that is located on the outside of the hole and has a larger width compared to the width of the first part, the width of the second part being the same with or larger than the width of the hole.

A semiconductor device includes: a semiconductor layer; a first area and a second area which are demarcated by a separation insulating layer provided on the semiconductor layer; a nonvolatile memory provided on the first area; a plurality of MOS transistors provided on the second area; a first interlayer insulating layer embedded between the plurality of MOS transistors on the second area; and a second interlayer insulating layer provided above the first area and the second area. The second interlayer insulating layer is provided as if covering the nonvolatile memory on the first area and, on the second area, provided, being above the first interlayer insulating layer, as if covering the MOS transistor.

Semiconductor device having nonvolatile memory device with improved charge holding property

An imaging device comprising: a photoelectric conversion element generating photo-generated charges; an accumulation well accumulating the charges; a modulation well storing the charges; a modulation transistor having a channel threshold voltage controlled by the stored charges and outputting a corresponding signal; a transfer control element having a control end coupled to a control end of the modulation transistor and controlling the potential barrier of a transfer channel between the accumulation and modulation wells, and controlling transfer of the charges; an unwanted electric charge discharging control element controlling the potential barrier of an unwanted electric charge discharging channel coupled to the accumulation well, and discharging charges overflowing from the accumulation well during a period except for the charges transfer period; and a residual charge discharging control element controlling the potential barrier of a residual electric charge discharging channel coupled to the modulation well, and discharging residual charges in the modulation well.

Solid state imaging device and method of driving the same

A semiconductor device comprising: a first light shielded region including a first semiconductor element, the first light shielded region being defined by a first light shielding wall provided in the periphery thereof; a second light shielded region including a second semiconductor element, the second light shielded region being defined by a second light shielding wall provided in the periphery thereof and being provided in a position adjacent to the first light shielded region; a first opening provided in the first light shielding wall; a second opening provided in the second light shielding wall and positioned facing to the first opening; a first wiring layer coupled with the first semiconductor element and brought out to the outside of the first light shielded region from the first opening; a second wiring layer coupled with the second semiconductor element and brought out to the outside of the second light shielded region from the second opening; and a light shielding film provided at least above a region sandwiched between the first light shielded region and the second light shielded region.

Semiconductor device including light shieled structures

A solid-state imaging device comprising: a photoelectric conversion element generating photo-generated charges; an accumulation well accumulating the charges; a modulation well holding the charges from the accumulation well; a modulation transistor controlled by the charges held in the modulation well and that outputs a signal corresponding to the charges; a transfer control element changing the potential barrier of a transfer channel between the accumulation and modulation wells to control transfer of the charges; an unwanted charges discharging control element controlling the potential barrier of an unwanted charges discharging channel coupled to the accumulation well, and discharging charges that overflow from the accumulation well during a period other than the transfer period when the photo-generated charges are transferred; and a residual charges discharging control element controlling the potential barrier of a residual charges discharging channel coupled to the modulation well, and discharging residual charges in the modulation well.

Solid-state imaging device and method of driving the same

Embodiments include semiconductor devices and a methods for manufacturing the same that suppress deficiencies in the transistor characteristics. A method for manufacturing a semiconductor device includes the steps of (A) forming a polishing stopper layer having a predetermined pattern over a substrate , (B) removing a part of the substrate using the polishing stopper layer as a mask to form a trench , (C) forming a trench oxide film over a surface of the substrate that forms the trench , (D) forming an insulating layer that fills the trench over an entire surface of the substrate, (E) polishing the insulating layer by a chemical-mechanical polishing, (F) removing the polishing stopper layer , and (G) etching a part of the insulating layer to form a trench insulating layer . The method further includes the step (a) of forming an etching stopper layer for the trench oxide film over the trench oxide film at least above the trench , and the etching stopper layer 90 is more resistant to etching than the insulating layer in the step (G).

Methods for manufacturing a semiconductor device including a trench isolation region

A semiconductor integrated circuit device including a memory cell array in which nonvolatile semiconductor memory devices (memory cells) are arranged in a matrix with a plurality of rows and columns. The nonvolatile semiconductor memory device includes a word gate formed on a semiconductor substrate with a first gate insulating layer interposed, an impurity diffusion layer formed in the semiconductor substrate which forms either a source region or a drain region, and first and second control gates in the shape of sidewalls formed along either side of the word gate. Each of the first and second control gates is disposed on the semiconductor substrate with a second gate insulating layer interposed, and also on the word gate with a side insulating layer interposed. The first and second control gates extend in the column direction. A pair of first and second control gates which are adjacent in the row direction is connected to a common contact section.

Semiconductor integrated circuit device including nonvolatile semiconductor memory devices having control gates connected to common contact section

A method of manufacturing a semiconductor integrated circuit device including a memory cell array in which non-volatile semiconductor memory devices are arranged in a matrix of a plurality of rows and columns.

Method of manufacturing semiconductor integrated circuit device including nonvolatile semiconductor memory devices

A method for reducing implant-induced damage and residual photo-resist-induced damage to a gate insulator layer first forms a gate insulator layer on portions of a semiconductor substrate. A first gate electrode layer is formed over the gate insulator layer, this first gate electrode layer being thinner than the desired final gate electrode thickness. A threshold adjustment implant is performed through the first, thin, gate electrode layer and underlying gate insulator layer. A second gate electrode layer is formed over the first gate electrode layer such that the thickness of the first and second gate electrode layers are substantially equal to the desired final gate electrode thickness. The first and second gate electrode layers are then patterned concurrently by conventional photolithography processes to form the gate electrodes. These steps prevent the attachment of resist particles to the gate insulator layer and prevent the ion implant-induced damage to the gate insulator by using the first gate electrode layer as a buffer.

Growing community of inventors

Sakata, Japan

Yutaka Maruo