Hamamatsu-photonics K.k.

Yutaka Kuramoto

Tomofumi Suzuki

Kyosuke Kotani

Tatsuya Sugimoto

Katsumi Shibayama

Noburo Hosokawa

Hirokazu Yamamoto

Takuo Koyama

Daiki Suzuki

Masashi Ito

Nao Inoue

In an optical device, a base and a movable unit are constituted by a semiconductor substrate including a first semiconductor layer, an insulating layer, and a second semiconductor layer in this order from one side in a predetermined direction. The base is constituted by the first semiconductor layer, the insulating layer, and the second semiconductor layer. The movable unit includes an arrangement portion that is constituted by the second semiconductor layer. The optical function unit is disposed on a surface of the arrangement portion on the one side. The first semiconductor layer that constitutes the base is thicker than the second semiconductor layer that constitutes the base. A surface of the base on the one side is located more to the one side than the optical function unit.

Optical device

An optical device includes a support portion, a movable portion; and a pair of torsion bars. An optical function portion is provided on one surface of the movable portion and a rib portion is provided on the other surface of the movable portion. The rib portion includes eight extending portions of first to eighth extending portions. When setting directions in which the first to eighth extending portions extend as first to eighth extending directions respectively, and setting an angle between the first and second extending directions as a first angle, an angle between the third and fourth extending directions as a second angle, an angle between the fifth and sixth extending directions as a third angle, and an angle between the seventh and eighth extending directions as a fourth angle, each of the first and second angle is larger than each of the third and fourth angle.

Optical device production method

A mirror unitincludes a mirror deviceincluding a baseand a movable mirror, an optical function member, and a fixed mirrorthat is disposed on a side opposite to the mirror devicewith respect to the optical function member. The mirror deviceis provided with a light passage portionthat constitutes a first portion of an optical path between the beam splitter unitand the fixed mirror. The optical function memberis provided with a light transmitting portionthat constitutes a second portion of the optical path between the beam splitter unitand the fixed mirror. A second surfaceof the baseand a third surfaceof the optical function memberare joined to each other.

Mirror unit and optical module

An optical device includes a support portion a movable unit and a pair of torsion bars disposed on both sides of the movable unit on a first axis. The movable unit includes a main body portion, a ring-shaped portion surrounding the main body portion when viewed from a predetermined direction perpendicular to the first axis, two connection portions connecting the main body portion and the ring-shaped portion to each other, and a rib portion provided to the main body portion. Each of the two connection portions includes two connection regions that are separated from each other by a space and the each of the two connection region connects the main body portion and the ring-shaped portion to each other. The rib portion includes four extending portions radially extending between a center of the main body portion and the four connection regions respectively when viewed from the predetermined direction.

A method for manufacturing an optical device includes: preparing a semiconductor substrate that includes a portion corresponding to a base, a movable unit, and an elastic support portion; forming a first resist layer in a region corresponding to the base on a surface of a first semiconductor layer which is opposite to an insulating layer; forming a depression in the first semiconductor layer by etching the first semiconductor layer using the first resist layer as a mask; forming a second resist layer in a region corresponding to a rib portion on a bottom surface of the depression, a side surface of the depression, and the surface of the first semiconductor layer which is opposite to the insulating layer; and forming the rib portion by etching the first semiconductor layer until reaching the insulating layer using the second resist layer as a mask.

A mirror unitincludes a mirror deviceincluding a baseand a movable mirror, an optical function member, and a fixed mirrorthat is disposed on a side opposite to the mirror devicewith respect to the optical function member. The optical function memberis provided with a light transmitting portionthat constitutes a part of an optical path between the beam splitter unitand the fixed mirror. The light transmitting portionis a portion that corrects an optical path difference that occurs between an optical path between the beam splitter unitand the movable mirrorand the optical path between the beam splitter unitand the fixed mirror. The second surfaceof the baseand the third surfaceof the optical function memberare joined to each other.

A light module includes an optical element and a base on which the optical element is mounted. The optical element has an optical portion which has an optical surface; an elastic portion which is provided around the optical portion such that an annular region is formed; and a pair of support portions which is provided such that the optical portion is sandwiched in a first direction along the optical surface and in which an elastic force is applied and a distance therebetween is able to be changed in accordance with elastic deformation of the elastic portion. The base has a main surface, and a mounting region in which an opening communicating with the main surface is provided. The support portions are inserted into the opening in a state where an elastic force of the elastic portion is applied.

Light module

An optical moduleincludes: a mirror unitincluding a base, a movable mirror, and a fixed mirror; a beam splitter unitthat is disposed on one side of the mirror unitin a Z-axis direction; a light incident unitthat causes measurement light Lto be incident to the beam splitter unit; a first light detectorthat is disposed on the one side of the beam splitter unitin the Z-axis direction, and detects interference light Lof measurement light which is emitted from the beam splitter unit; a supportto which the mirror unitis attached; a first support structurethat supports the beam splitter unit; and a second support structurethat is attached to the supportand supports the first light detector

Optical module having high-accuracy spectral analysis

An optical moduleA includes a mirror unitincluding a movable mirrorand a fixed mirror, a beam splitter unit, a light incident unit, a first light detector, a second light source, a second light detector, a holding unit, a first mirror, a second mirror, and a third mirror. The holding unitholds the first light detector, the second light detector, and the second light sourceso as to face that same side, and to be aligned in this order. A length of an optical path between the unitand the detectoris shorter than a length of an optical path between the unitand the detector, and a length of an optical path between the unitand the source

Optical module

A mirror unit includes a mirror device, a light incident/emission portion, and a support portion. The mirror device includes a base, a movable mirror, and a drive unit. The light incident/emission portion includes a first joining portion joined to a region that is located between a first electrode pad and a second electrode pad, and at least one of the movable mirror and the drive unit in a first surface of the base, and a first main body portion. The support portion includes a second joining portion joined to a region that overlaps each of the first electrode pad and the second electrode pad when viewed from a first direction in a second surface of the base, and a second main body portion. The first main body portion is provided with a first light passage region that overlaps a mirror surface of the movable mirror when viewed from the first direction.

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Hamamatsu, Japan

Yutaka Kuramoto