Kabushiki Kaisha Shinkawa

Yutaka Kondo

Osamu Kakutani

Kohei Seyama

Yoshihiko Seino

Ryuichi Kyomasu

An ultrasonic horn used in, for instance, a wire bonding apparatus and formed with mounting flanges, including a slit and a cross-sectional shape varying portion; the slit being on the central axis in the horn's longitudinal direction and extending fore and aft relative to the center of the mounting flanges, the length of the slit(s) being equal to or greater than the width direction of a flange region that is between the opposing flanges, and at least a part of the cross-sectional shape varying portion being on the outer surface of the horn at a slit region in which the slit is formed. The stress center point in the cross-section of the ultrasonic horn at the flange region is positioned more to the inside than a straight line joining the stress center points in the cross-sections of the ultrasonic horn at the front and rear end portions of the slit.

Ultrasonic horn

In an bonding apparatus, a piezoelectric elementbeing built into the vicinity of the capillary attachment portion of a bonding armso that the capillarycan be caused to vibrate in the axial direction of the bonding arm. The preparatory pressure application device that applies a preparatory pressure to the piezoelectric elementincludes two wedge-form attachment basesandwhich are disposed to the rear of or behind the piezoelectric element, and a preparatory pressure boltwhich is screwed into the wedge-form attachment basefrom the outside of the bonding arm; and a preparatory pressure is applied to the piezoelectric elementby the movement of the wedge-form attachment basein the axial direction of the bonding armcaused by the rotation of the preparatory pressure bolt

Wire bonding apparatus

A bonding arm swinging type bonding apparatus that has a rotational centerof the bonding armbeneath the bonding arm. The rotating shaft partsof circular arc form rotary motorsthat rotate about the rotational centerof the bonding armare attached to the bonding arm, and the rotating shaft partsof circular arc form air bearingsthat rotate about this rotational centerare provided so that the rotating shaft parts of the circular arc form air bearingsare rotatable as a unit with the rotating shaft partsof the rotary motors

Bonding arm swinging type bonding apparatus

A bonding apparatus including a front link whose lower end is rotatably connected to a bonding arm and upper portion is rotatably connected to bonding head, and a rear link whose lower end is rotatably connected to the rear end of the bonding arm and upper portion is rotatably connected to the bonding head; and a hypothetical rotational center of capillary of the bonding arm is on a bonding surface and set to be the intersection of a line that connects upper and lower rotational centers of the front link and a line that connects upper and lower rotational centers of the rear link, wherein the immovable element of motor is fastened to the bonding head, and the rotational element of the motor is attached to the upper end of the rear link so that the rotational element rotates about the upper rotational center of the rear link.

Bonding apparatus

A wire bonding apparatus that include a piezoelectric elementprovided near the capillary attachment portion of a bonding armso that a capillaryvibrates in the axial direction of the bonding arm, the piezoelectric elementbeing driven by a piezoelectric element driving power source. The wire bonding apparatus further includes a detectorand a bonding arm control circuit, wherein the detectordetects the voltage or current generated by the piezoelectric elementwhen the capillaryis lowered and contacts the object of bonding, and the bonding arm control circuitcontrols the lowering motion of the bonding armin accordance with the changes in the voltage or current detected by this detector

Wire bonding method and apparatus

A wire bonding apparatus with a bonding head that includes an ultrasonic transducer having a capillary at its tip end, piezo-electric elements that form a pair of complementary action type extension and retraction driving elements which cause the ultrasonic transducer to move with respect to a transducer holder, an impact detection sensor, and a Z motor which drives the transducer holder. The piezo-electric elements are arranged so that when one of them is driven to extend, the other is driven to retract. When the impact detection sensor detects that the capillary is lowered by the Z motor and comes into contact with a bonding object (semiconductor chip), the driving of the Z motor is stopped, and the piezo-electric elements are driven to the directions of extension and retraction in a complementary manner, thus swinging the ultrasonic transducer and moving the capillary upward.

Growing community of inventors

Tachikawa, Japan

Yutaka Kondo