Konica Corporation

Konishiroku Photo Industry Co., Ltd.

Hitachi, Ltd.

Ricoh Company, Ltd.

Tetra Laval Holdings & Finance S.a.

Hitachi-High-Technologies Corporation

Tetra Pak International Aktiebolag

Konica Technosearch Corp.

Megumi Ide

Ricoh Company, Ltd. and Nippon Telegraph and Telephone Corporation

Yutaka Kaneko

Hiroyuki Shinada

Atsuko Takafuji

Yasutsugu Usami

Katsuya Sugiyama

Hiroshi Kita

Mitsugu Sato

Toyoaki Masukawa

Mitsuto Fujiwhara

Mikio Kawasaki

Syunji Matsuo

Hideo Todokoro

Mari Nozoe

Mikio Ichihashi

Satoru Fukuhara

Satoru Ikesu

Hiroshi Toyama

Yuko Iwabuchi

Hiroyoshi Mori

Katsuhiro Kuroda

Shunji Maeda

Maki Tanaka

Takashi Hiroi

Yusuke Yajima

Hitoshi Kubota

Haruo Yoda

Aritoshi Sugimoto

Kimiaki Ando

Kazushi Yoshimura

Hiroshi Tooyama

Tadao Ino

Satoshi Kawakatsu

Takashi Sasaki

Shuji Kida

Shigeto Hirabayashi

Hidetaka Ninomiya

Toshihiko Kimura

Kimie Tachibana

Kenji Kadokura

Takanori Ninomiya

Hiroshi Makino

Yuko Sasaki

Hisaya Murakoshi

Kenji Tanimoto

Taku Ninomiya

Fumio Ishii

Yuji Kasai

Nicola Garuti

Shinji Yoshimoto

Hiroshi Ishidai

Shuichi Sugita

Toyoki Nishijima

Fumio Murai

Shigeki Hirasawa

Eiichi Sakamoto

Masakazu Sugaya

Satoshi Nakagawa

Hidetoshi Konno

Katsunori Kato

Koji Daifuku

Masafumi Kanetomo

Yasuo Tsuda

Tomoji Watanabe

Kazuhiko Kimura

Tatuharu Yamamoto

Mitsuhisa Fukuda

Kaoru Onodera

Kazuyuki Shimada

Takashi Ohshima

Takeshi Kawasaki

Hiroyoshi Funato

Shigeto Isakozawa

Masanori Saitoh

Noritaka Nakayama

Paolo Benedetti

Souichi Katagiri

Atsushi Tomotake

Noboru Mizukura

Katsunori Katoh

Hiroshi Sugita

Hiroto Kasai

Osamu Ishige

Keiji Yano

Naoki Sato

Hideaki Haraga

Filippo Ferrarini

Tamio Ishihara

Isamu Shibata

Tsutomu Ishida

Atsuo Ezaki

Hajime Wada

Koichiro Takeuchi

Hideo Akamatsu

Masahiro Tomita

Iwao Hamaguchi

Junji Endo

Kosaku Masuda

Kaoru Shinozaki

Masami Sakamoto

Takashi Kamio

A method for forming sealed packages filled with a pourable product comprises at least the steps of forming a tube from a web of packaging material, filling the pourable product into the tube for forming a product column within the tube and directing, during the step of forming and the step of filling, a sterile gas into the product column for forming and/or maintaining a gas cushion within the product column.

Method and a packaging apparatus for forming sealed packages

A method for forming sealed partially-filled packages filled with a pourable product comprises at least forming a tube from a web of packaging material, filling the pourable product into the tube for forming a product column within the tube, directing a sterile gas into the product column for forming and/or maintaining a gas cushion within the product column, and forming and transversally sealing the tube, for obtaining the packages containing the pourable product and a gas space formed from a defined volume of the sterile gas originating from the gas cushion.

Method and a packaging apparatus for forming sealed partially-filled packages

There is described a packaging apparatus for forming a plurality of sealed packages from a tube of a web of packaging material which is continuously filled with a pourable product. The packaging apparatus comprises a delimiting element arranged, in use, within the tube and being designed to divide the tube, in use, in a first space and a second space. The packaging apparatus also comprises a pressurizing device for pressurizing the second space by a sterile gas withdrawn from the inner environment of an isolation chamber within which the tube is formed. Furthermore, the delimiting element is also designed to allow, in use, a leakage flow of sterile gas from the second space into the first space.

Packaging apparatus for forming sealed packages

A packaging and filling machine that is capable of easily preforming with the forming flaps by keeping the pressure of the filled liquid food in the tube at positive pressure, capable of preventing the pressure of the liquid food from dropping to negative pressure, even if the pressure of the liquid food decreases due to the change in the liquid food pressure, and capable of preventing outside atmosphere materials from invading into the tube. A pressure flange fixed on a periphery of the filling pipe absorbs fluctuation of the pressure of the liquid food in the tube below the pressure flange, and prevents the liquid food pressure from dropping to negative pressure to keep the pressure of the liquid food in the tube below the pressure flange at a positive pressure.

Packaging and filling machine

A packaging and filling machine is capable of easily preforming with the forming flaps by keeping the pressure of the filled liquid food in the tube the positive pressure, capable of preventing the pressure of the liquid food from dropping to negative pressure, even if the pressure of the liquid food decreases due to the up-and-down of the liquid food pressure, and capable of preventing outside atmosphere materials from invading into the tube. A positive pressure keeping means absorbs fluctuation of the pressure of the liquid food in the tube below the pressure flange, and prevents the liquid food pressure from dropping in negative pressure to keep the pressure of the liquid food in the tube below the pressure flange a positive pressure.

The inspection apparatus disclosed generates an electron beam, an acceleration electrode accelerates the electron beam, a convergence lens converges the electron beam, an electron beam deflector scans the beam over a sample, an objective lens converges the electron beam on the sample, a detector located between the sample and the objective lens detects charged particles emitted from the sample, a power supply applies a retarding voltage to the sample for decelerating the electron beam to the sample, an electrode is disposed between the objective lens and the sample, and a voltage is generated between the sample and the electrode by said electrode, the voltage being determined depending on the sample. The apparatus solves problems encountered in conventional inspection systems.

Method and an apparatus of an inspection system using an electron beam

Problems encountered in the conventional inspection method and the conventional apparatus adopting the method are solved by the present invention using an electron beam by providing a novel inspection method and an inspection apparatus adopting the novel method which are capable of increasing the speed to scan a specimen such as a semiconductor wafer. The inspection novel method provided by the present invention comprises the steps of: generating an electron beam; converging the generated electron beam on a specimen by using an objective lens; scanning the specimen by using the converged electron beam; continuously moving the specimen during scanning; detecting charged particles emanating from the specimen at a location between the specimen and the objective lens and converting the detected charged particles into an electrical signal; storing picture information conveyed by the electrical signal; comparing a picture with another by using the stored picture information; and detecting a defect of the specimen.

Method and apparatus of an inspection system using an electron beam

A circuit pattern inspection method and an apparatus therefore, in which the whole of a portion to be inspected of a sample to be inspected is made to be in a predetermined changed state, the portion to be inspected is irradiated with an image-forming high-density electron beam while scanning the electron beam, secondary charged particles are detected at a portion irradiated with the electron beam after a predetermined period of time from an instance when the electron beam is irradiated, an image is formed on the basis of the thus detected secondary charged particle signal, and the portion to be inspected is inspected by using the thus formed image.

Method and apparatus for inspecting integrated circuit pattern

In electron holography observation using a transmission electron microscope, searching of conditions of an electron optical condition which are necessary for realizing a requested spatial resolution is sophisticated and for persons unaccustomed to operation of the electron microscope, the observation is time consuming work. In addition to the fundamental electron microscope proper, an input unit for inputting a spatial resolution requested in the holography observation, a calculation unit for calculating positions of electron biprism and specimen necessary for realizing the requested spatial resolution from the inputted value and parameters characteristic of the device and mechanisms for moving the two positions for realizing the obtained calculation results are provided.

Electron holography system

The present invention provides a compact electron lens causing little aberration, and a charged particle beam apparatus such as a scanning electron microscope that is super compact and offers a high resolution. An upper magnetic pole and a sample-side magnetic pole are magnetically coupled to the respective poles of a permanent magnet that is made of a highly strong magnetic material such as a rare-earth cobalt system or a neodymium-iron-boron system, that is axially symmetrical, and that has a hole in the center thereof. An inner gap is created on the side of a center axis. Thus, a magnetic lens is formed axially. Moreover, a semi-stationary magnetic path that shields an outside magnetic field and has the magnetic reluctance thereof regulated is disposed outside. The sample-side magnetic pole and magnetic path defines a region where magnetic reluctance is the highest outside the permanent magnet. A space defined by the permanent magnet, upper magnetic pole, sample-die magnetic pole, and semi-stationary magnetic path is filled with a filling made of a non-magnetic material. Thus, an objective lens is constructed.

Electron lens and charged particle beam apparatus

A circuit pattern inspection method and an apparatus therefor, in which the whole of a portion to be inspected of a sample to be inspected is made to be in a predetermined charged state, the portion to be inspected is irradiated with an image-forming high-density electron beam while scanning the electron beam, secondary charged particles are detected at a portion irradiated with the electron beam after a predetermined period of time from an instance when the electron beam is irradiated, an image is formed on the basis of the thus detected secondary charged particle signal, and the portion to be inspected is inspected by using the thus formed image.

An apparatus for inspecting a sample using a scanning electron microscope includes a sample stage, a first electron-optical system to scan an electron beam of a first beam current on the sample, a second electron-optical system to scan an electron beam of a second beam current smaller than the first beam current on the sample, a mechanism to move the sample stage, a detector provided in each of the first and second electron-optical systems to detect a secondary electron. The first electron-optical system is operable in a first mode and the second electron-optical system is operable in a second mode with higher resolution than that of the first mode. In the first mode, the sample is observed while the sample stage is moved continuously, and in the second mode, the sample is observed by detecting a secondary electron using the detector while the sample stage is held stationary.

Method of inspecting a circuit pattern and inspecting instrument

A circuit pattern inspecting instrument includes an electron-optical system for irradiating an electron beam on a sample, an electron beam deflector, a detector for detecting secondary charged particles from the sample, and a mode setting unit for switching between a first mode and a second mode. An electron beam current is larger in the first mode than in the second mode, and an electron beam scanning speed is higher in the first mode than in the second mode. The circuit pattern inspecting instrument is configured so that first the sample is observed in the first mode, then a particular position on the sample is selected based on image data produced by an output of the detector in the first mode, and then the particular position on the sample is observed in the second mode.

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Hino, Japan

Yutaka Kaneko