Hitachi, Ltd.

Yutaka Ebara

Masao Sakata

Seiji Ishikawa

Yuzo Taniguchi

Sadao Shimoyashiro

Hiroto Nagatomo

Isao Miyazaki

Kazuhiko Matsuoka

Jun Nakazato

Kimio Muramatsu

Yuichi Ohyama

Yuzaburo Sakamoto

Tsutomu Okabe

Shuichi Hanashima

Osamu Satou

Taizo Hashimoto

The present invention provides data analysis stations respectively for a probing tester and an automatic particle inspection machine. And, in the data analysis station, the coordinates on which the disposition of the chips are described on a product basis are equal to those on which the locations of the defects are described. Further, the station provides a function of determining which of the chips each defect belongs to. These data analysis stations are connected through a communication line. The present invention is capable of analyzing the data on a chip basis, resulting in being able to grasp the relation between how the defects are caused on each chip and the product character of the chip.

Inspection data analyzing system

The present invention provides data analysis stations respectively for a probing tester and an automatic particle inspection machine. And in the data analysis station, the coordinates on which the disposition of the chips are described on a product basis are equal to those on which the locations of the defects are described. Further, the station provides a function of determining which of the chips each defect belongs to. These data analysis stations are connected through a communication line. The present invention is capable of analyzing the data on a chip basis, resulting in being able to grasp the relation between how the defects are caused on each chip and the product character of the chip.

Inspection system and method using separate processors for processing different information regarding a workpiece such as an electronic device

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Maebashi, Japan

Yutaka Ebara