Seiko Epson Corporation

Yutaka Arakawa

Tomohisa Iwazaki

Akio Konishi

Kiichi Kajino

Osamu Miyazawa

Yuichiro Tsuyuki

Tomoaki Takahashi

Koichi Kamijo

Noboru Furuya

Akira Nemura

Daisuke Yamada

Yudai Okamae

Tomo Ikebe

Yasuharu Hashimoto

Mitsuru Toyama

A control method for a robot system includes setting a robot arm in a first attitude, performing work in a first region of an object while moving a tool relative to the object by a moving stage with the first attitude maintained, setting the robot arm in a second attitude, imaging the object using a camera and correcting a position of the tool by driving of the moving stage based on an imaging result with the second attitude maintained, and performing the work in a second region of the object while moving the tool relative to the object by the moving stage with the second attitude maintained.

Control method for robot system and robot system

A piezoelectric drive device includes two vibrators having vibrating portions with piezoelectric elements and transmitting portions placed in the vibrating portions and transmitting drive forces to a driven member (e.g. a slider), and a fixing portion having through holes (first through hole, second through hole) into which pins or screws are inserted. The two vibrators are placed adjoiningly along a drive direction of the slider, and the fixing portion is placed between the two vibrators and fixing the two vibrators.

Piezoelectric drive device and robot

A rotary-to-linear motion converter includes: a drive portion including a vibrating portion vibrating by a piezoelectric body and a convex portion coupled to the vibrating portion; a housing; a rotating member including a first screw portion and a driven surface that contacts the convex portion and that receives driving force of the drive portion, the rotating member pivoting around an axial center relative to the housing; a linearly moving member including a second screw portion threadably engaging with the first screw portion; and a restricting portion that is disposed at the housing and that restricts rotation of the linearly moving member.

Rotary-to-linear motion converter

The horizontal articulated robot includes a platform, a first arm which is coupled to the platform, which moves along a first linear-motion axis with respect to the platform, and which rotates around a first rotational axis parallel to the first linear-motion axis, a second arm which is coupled to the first arm, which moves along a second linear-motion axis different in direction from the first linear-motion axis with respect to the first arm, and which rotates around a second rotational axis parallel to the first rotational axis, a third arm which is coupled to the second arm, and which rotates around a third rotational axis perpendicular to the first linear-motion axis, and a fourth arm which is coupled to the third arm, and which rotates around a fourth rotational axis perpendicular to the third rotational axis.

Horizontal articulated robot and horizontal articulated robotic system

A vibrator includes a vibrating part including a pair of vibrating plates and a piezoelectric material provided between the pair of vibrating plates, a supporting part including a pair of supporting plates and an interplate portion provided between the pair of supporting plates, and a wire provided in the vibrating part and the supporting part, wherein the wire is exposed from the supporting part.

Vibrator, piezoelectric actuator, piezoelectric motor, robot, electronic component conveyance apparatus, and manufacturing method of vibrator

A piezoelectric motor includes a piezoelectric actuator, a holding member that holds the piezoelectric actuator, a housing in which the piezoelectric actuator and the holding member are placed, a first positioning pin that positions the holding member and the housing, and a first fixing part that fixes the first positioning pin. In the piezoelectric motor, the first positioning pin is fixed to one of the holding member and the housing, and a first hole portion in which the first positioning pin is placed is provided in the other of the holding member and the housing. The first fixing part fixes relative positions of the first hole portion and the first positioning pin.

Piezoelectric motor and robot

A piezoelectric driving device includes a piezoelectric vibrating body and a driving circuit. The piezoelectric vibrating body includes a contact which extends in a first direction and comes into contact with a driven member, a first piezoelectric element which generates bending vibration in a direction intersecting with the first direction in accordance with a first driving voltage, and a second piezoelectric element which generates longitudinal vibration in the first direction in accordance with a second driving voltage. The piezoelectric vibrating body is configured such that a resonance frequency of the longitudinal vibration is higher than a resonance frequency of the bending vibration. The driving circuit sets a driving frequency of each of the first driving voltage and the second driving voltage to be equal to or higher than the resonance frequency of the longitudinal vibration.

Piezoelectric driving device, driving method of piezoelectric driving device, robot, electronic component transport apparatus, printer, and projector

A robot arm includes a distal end unit having a gripping part and a first supporting part that supports the gripping part, a first drive unit that, with an axis along a direction in which the gripping part and the first supporting part are arranged as a first axis, pivots the gripping part about a first pivot axis along the first axis relative to the first supporting part, a second supporting part that supports the first supporting part, and a second drive unit that, with an axis orthogonal to the first axis as a second axis, pivots the distal end unit about a second pivot axis along the second axis relative to the second supporting part, wherein the first drive unit includes a piezoelectric motor, and the second pivot axis crosses the distal end unit.

Robot arm

A piezoelectric drive device includes a rotor having a driven part and rotating around a rotation axis, a vibrating unit having a piezoelectric element and applying a drive force for rotating the rotor to the driven part by displacement of the piezoelectric element, and a bearing supporting the rotor. The driven part has a first portion, a second portion, and a third portion sequentially connected, the first portion has a predetermined region along an axial direction of the rotation axis and coupled to an inner ring of the bearing within the predetermined region, the second portion overlaps with the bearing in a plan view from the axial direction, and the third portion has a contact surface in contact with the vibrating unit at an inner side of both ends of the predetermined region in a plan view from a direction perpendicular to the axial direction.

A piezoelectric drive device includes a rotor which has an output section for outputting a rotational force and a transmission section disposed on an outer periphery of the output section, and rotates around a rotational axis, and a vibrating part which has a piezoelectric element, and rotates the rotor due to a deformation of the piezoelectric element. The transmission section has a first portion and a second portion different from each other in position in a radial direction from the output section toward the transmission section, the first portion is coupled to the output section, the second portion is higher in Young's modulus than the first portion, the second portion is higher in mass per unit volume than the first portion, and the vibrating part makes contact with the transmission section at a position overlapping the second portion in a plan view from an axial direction of the rotational axis.

A piezoelectric driving device includes a first substrate having cleavability, and a piezoelectric element placed above the first substrate, wherein a cleavage direction of the first substrate and a direction in which a shear force is applied do not coincide in a plan view of the first substrate. Further, an angle formed by the cleavage direction of the first substrate and the direction in which the shear force is applied is equal to or larger than 20&#xb0; in the plan view of the first substrate. Furthermore, the first substrate contains silicon single crystal.

Piezoelectric driving device, piezoelectric motor, robot, electronic component conveyance apparatus, printer, and projector

An adjusting mechanism includes a movable plate having a substantially rectangular shape and including a long side and a short side, a position adjusting actuator configured to come into contact with and press the movable plate, a reference plate on which the movable plate is placed, and an elastic member coupling the movable plate and the reference plate, the elastic member being elastically deformable in a direction along an X axis. The position adjusting actuator adjusts a position of the movable plate with respect to the reference plate when the position adjusting actuator presses the movable plate in the direction along the X axis and moves the movable plate in the direction along the X axis and a &#x3b8;z direction.

Adjusting mechanism

A piezoelectric drive device includes: a vibrating body having a first surface and a second surface provided with a recessed portion; and a piezoelectric element provided on the first surface. The recessed portion and the piezoelectric element have an overlap region when viewed in a normal direction of the second surface.

Piezoelectric drive device, robot, and method for driving piezoelectric drive device

A first member, a second member, a bearing that rotatably supports the second member about a rotation axis relative to the first member, a driven member placed on the first member, and a plurality of piezoelectric actuators that transmit driving forces for rotating the second member about the rotation axis relative to the first member to the driven member are provided, and the piezoelectric actuators are supported by the second member while being pressed against the first member or the member fixed thereto, and, as seen from a direction along the rotation axis, a center of pressing forces from the plurality of piezoelectric actuators to the driven member is located inside of an outer circumferential part of the bearing.

Piezoelectric driving device, electronic component conveyance apparatus, robot, projector, and printer

A piezoelectric driving device includes a supporting section, a first moving section movable in a first direction relative to the supporting section, a second moving section movable in a second direction relative to the first moving section, a first driving section configured to drive a first piezoelectric actuator to move the first moving section relative to the supporting section and stop the first piezoelectric actuator to hold the first moving section on the supporting section, and a second driving section configured to drive a second piezoelectric actuator to move the second moving section relative to the first moving section and stop the second piezoelectric actuator to hold the second moving section on the first moving section. A first holding force for holding the first moving section on the supporting section and a second holding force for holding the second moving section on the first moving section are different from each other.

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Hara, Japan

Yutaka Arakawa