Japan Pionics Co., Ltd.

Japan Pionics., Ltd.

Yutaka Amijima

Kenji Otsuka

Ryuji Hasemi

Satoshi Arakawa

Youji Nawa

Norihiro Suzuki

Cleaning agent and cleaning process of harmful gas

A cleaning agent and a cleaning process for efficiently removing noxious halogen-based gases such as fluorine, chlorine, boron trifluoride, boron trichloride and tungsten hexafluoride from exhaust gases from semiconductor fabrication processes. The cleaning agent is produced by adherently adding alkali metal formate and/or alkaline earth metal formate to activated carbon, or adherently adding alkali metal hydroxide and/or alkaline earth metal hydroxide together with alkali metal formate and/or alkaline earth metal formate to activated carbon. By exposing exhaust gases to the cleaning agent, noxious halogen-based gases in the exhaust gases are efficiently removed with little desorption of halogen-based gases adsorbed on the cleaning agent. Also, the cleaning treatment is further improved in safety and efficiency by a pre-treatment cleaning agent comprising a metal oxide or a metal hydroxide and a post-treatment cleaning agent prepared by adherently adding sodium formate to a metal oxide.

Purifying agent and purification method for halogen-containing exhaust gas

Growing community of inventors

Kanagawa-ken, Japan

Yutaka Amijima