Average Co-Inventor Count = 2.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Tokyo Electron Limited (2 from 10,341 patents)
2 patents:
1. 11244849 - Substrate transfer device and substrate transfer method
2. 10460976 - Substrate transfer device and substrate transfer method