Minebea Mitsumi Inc.

Yuta Aizawa

Toshiaki Asakawa

Atsushi Kitamura

Shinichi Niwa

Akiyo Yuguchi

Shinya Toda

Shintaro Takata

Eiji Misaizu

Aya Ono

Yosuke Ogasa

Syota Taneda

Iku Ishihara

A strain gauge includes a flexible substrate and a resistor formed of material including at least one of chromium or nickel, the resistor being situated above the substrate. The strain gauge includes a functional layer formed of an insulating material that has a higher thermal conductivity than the resistor, the functional layer being situated between the substrate and the resistor. The resistor includes multiple resistive patterns that are juxtaposed. The resistor includes folded portions each of which connects end portions of resistive portions that are next to each other. A first metallic layer formed of a material that has a higher thermal conductivity than the resistor is laminated on the folded portions.

Strain gauge

A strain gauge includes a flexible substrate and a functional layer formed of a metal, an alloy, or a metal compound, the functional layer being directly on one surface of the substrate. The strain gauge includes a resistor formed of a film that includes Cr, CrN, and CrN and that is formed with &#x3b1;-Cr as a main component. The functional layer includes a function of promoting crystal growth of &#x3b1;-Cr and forming an &#x3b1;-Cr based film.

A strain gauge includes a flexible substrate; a functional layer formed of a metal, an alloy, or a metal compound, on one surface of the substrate; and a resistor formed of material including at least one from among chromium and nickel, on one surface of the functional layer.

A strain gauge includes a flexible substrate and a functional layer formed of a metal, an alloy, or a metal compound, directly on one surface of the substrate. The strain gauge includes a resistor formed of a film including Cr, CrN, and CrN, on one surface of the functional layer. The substrate has an expansion coefficient in a range of from 7 ppm/K to 20 ppm/K.

Strain gauge with improved stability

A strain gauge includes a flexible substrate, and a plurality of resistors each formed of a Cr composite film, on or above the substrate. The substrate is attached to a flexure element, the plurality of resistors including two resistors disposed at locations at which the two resistors are opposite to each other, such that the flexure element is interposed between the two resistors.

Strain gauge and sensor module

A strain gauge includes a flexible substrate, and a functional layer formed of a metal, an alloy, or a metal compound, directly on one surface of the substrate. The strain gauge includes a resistor formed of a film including Cr, CrN, and CrN, on one surface of the functional layer. The substrate includes a filler. Surface unevenness on one surface of the substrate is 15 nm or less, and the resistor has a film thickness of 0.05 &#x3bc;m or more.

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Shizuoka, Japan

Yuta Aizawa