Average Co-Inventor Count = 5.60
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Tokyo Electron Limited (11 from 10,180 patents)
11 patents:
1. 12417925 - Method of conductive material deposition
2. 12009430 - Method for gate stack formation and etching
3. 11699741 - Metal-containing liner process
4. 11398386 - Plasma etch processes
5. 10998170 - Method for ion mass separation and ion energy control in process plasmas
6. 10903077 - Methods to protect nitride layers during formation of silicon germanium nano-wires in microelectronic workpieces
7. 10818482 - Methods for stability monitoring and improvements to plasma sources for plasma processing
8. 10818502 - System and method of plasma discharge ignition to reduce surface particles
9. 10504698 - Plasma processing apparatus
10. 10312057 - Plasma processing apparatus
11. 9412565 - Temperature measuring method and plasma processing system