Nikon Corporation

Niko Corporation

Yusuke Taki

Tsukasa Kishiume

Masaomi Kameyama

Norio Kaneko

Kiyoaki Shinohara

Yohei Takahashi

Yujiro Urakawa

Masaomi Kamaeyama

There is provided a sliding film formed on a surface of a member which slides relative to another member. The sliding film includes, a metal-doped tetrahedral amorphous carbon layer; and a surface layer that is formed on top of the metal-doped tetrahedral amorphous carbon layer and has a higher coefficient of kinetic friction than the metal-doped tetrahedral amorphous carbon layer.

Sliding film, member on which sliding film is formed, and manufacturing method therefor

A functional film that is applied to a surface of a medical apparatus or a biomaterial includes a film of Ti-doped tetrahedral amorphous carbon (ta-C:Ti film).

Functional film

A composite plastic member includes a first stacked body comprised of a plurality of chromium layers stacked on a plastic substrate; and a second stacked body comprised of a plurality of chromium nitride layers stacked on the first stacked body. Each of the first and second stacked bodies is formed such that a lower-hardness layer having a lower hardness than upper and lower layers which contact with and sandwich the lower-hardness layer therebetween and a higher-hardness layer having a higher hardness than upper and lower layers which contact with and sandwich the higher-hardness layer therebetween are alternately stacked in a stacking direction; and a thickness of a higher-hardness chromium nitride layer is not more than 40% of a thickness of a lower-hardness chromium nitride layer in the second stacked body. The composite plastic member has high wear resistance and satisfactory sliding performance, and the conductivity and excellent outer appearance.

Composite plastic member and method for producing the same

A functional film which is applied to a surface of a base material includes a film of Ti-doped tetrahedral amorphous carbon (ta-C:Ti film).

Functional film, liquid immersion member, method of manufacturing liquid immersion member, exposure apparatus, and device manufacturing method

A method for manufacturing a carbon nanotube assembly including the steps of: forming metallic fine particles, having a predetermined particle diameter, on a substrate; heating the metallic fine particles to a predetermined temperature of 300&#xb0; C. to 400&#xb0; C. in a reducing atmosphere to cause reduction at surfaces thereof; heating the metallic fine particles to a predetermined reaction temperature in a reactor; and introducing an organic compound vapor into the reactor to grow carbon nanotubes on the metallic fine particles in such a way that a time during which the temperature of the metallic fine particles exceeds 450&#xb0; C. is 600 seconds or fewer for the period of time before the growth of the carbon nanotubes is started after the heating of the metallic fine particles is started.

Carbon nanotube assembly and manufacturing method thereof

Upon fixing fine particulate active element members, which are carbon nanotube, rod-shaped semiconductor crystal, or the like, in an electronic device at predetermined positions thereof respectively, a method for producing an electronic device includes: dispersing the fine particulate active element members in a dielectric liquid and filling the liquid in a space between a process-objective substrate and a mask which is placed opposite to the substrate and which has predetermined pattern electrodes formed therein; and applying a predetermined voltage to the predetermined electrodes to concentrate the fine particulate active element members at positions which correspond to positions of the pattern electrodes, respectively. In this state, a light is irradiated to the substrate and the fine particulate active element members in the liquid so as to fix the fine particulate active element members to the substrate by a photochemical reaction. Thus, a high-performance electronic device using carbon nanotubes or rod-shaped semiconductor crystal can be manufactured at low cost.

Method for producing electronic device and electronic device

An optical element of the present invention comprises a fluorite substrate , and a lanthanum fluoride film formed directly on the substrate . The substrate on which the lanthanum fluoride film is formed, has a plane which is a (111) plane or a plane inclined by an angle within &plusmn;30 degrees, preferably within 15 degrees from the (111) plane. Therefore, the lanthanum fluoride film undergoes the crystal growth subjected to the C-axis orientation on the optical substrate. Since the lanthanum fluoride film is dense and has a small surface area, it scarcely involves the oxidation and hydroxylation areas as well as the structural defect. Therefore, it is possible to reduce the optical loss of the optical element in the vacuum ultraviolet region.

Optical element equipped with lanthanum fluoride film

A method for manufacturing an optical element includes replacing fluoride atoms at a surface of the optical element. The surface is imparted with properties of substantial prevention of charge retention and/or substantial prevention of charge build-up to help maintain transmissivity in the optical element.

Growing community of inventors

Sagamihara, Japan

Yusuke Taki