Kabushiki Kaisha Toshiba

Toshiba Memory Corporation

Kioxia Corporation

Yusuke Oshiki

Hirotaka Tsuda

Kiyotaka Miyano

Kei Watanabe

Mitsuhiro Omura

Shinichi Nakao

Shunsuke Ochiai

Takayuki Ito

Tomonori Aoyama

Kouji Matsuo

Toshihiko Iinuma

Kunihiro Miyazaki

Takuo Ohashi

Takaharu Itani

Kenichi Yoshino

Atsuko Sakata

Masayuki Kitamura

Junichi Wada

Yuya Matsubara

Soichi Yamazaki

Kosuke Horibe

A semiconductor storage device according to an embodiment includes: a first stacked body including a plurality of first electrode layers and a plurality of first insulating layers that are alternately stacked on a substrate in a first direction perpendicular to the substrate; a plurality of semiconductor films penetrating the first stacked body in the first direction; a second stacked body including a plurality of second electrode layers and a plurality of second insulating layers that are alternately stacked on the first stacked body in the first direction; and a plurality of contact plugs penetrating the second stacked body in the first direction and separately connected to the respective plurality of semiconductor films and the respective plurality of second electrode layers.

Semiconductor storage device and manufacturing method thereof

According to one embodiment, a method for manufacturing a semiconductor memory device includes simultaneously forming a plurality of first holes and a plurality of second holes in a stacked body. The stacked body includes a plurality of first layers and a plurality of second layers. The method includes etching a portion between the second holes next to each other in the stacked body, and connecting at least two or more second holes to form a groove. The method includes forming a film including a charge storage film on a sidewall of the first holes. The method includes forming a channel film on a sidewall of the film including the charge storage film.

Method for manufacturing semiconductor memory device and semiconductor memory device

A semiconductor memory device according to an embodiment includes: a semiconductor substrate; an insulating film provided on the semiconductor substrate; a conductive layer group including at least two conductive layers; a stacked body provided on the conductive layer group and including a plurality of films stacked; a memory film provided in a hole, the hole penetrating the stacked body and a part of the conductive layer group; and a slit splitting the stacked body and terminating at a position deeper than a contact portion between the conductive layer group and the memory film. The conductive layer group has a band-shaped part projecting to the stacked body side at a portion of the hole, and a groove part recessed to the semiconductor substrate side at a portion under the slit.

Semiconductor memory device and manufacturing method thereof

According to an embodiment, a semiconductor memory device includes a substrate, an insulating film, a plurality of conductive films, an insulating member, a plurality of stacked bodies, and a first member. The insulating member is provided on the insulating film, is positioned between the conductive films in a first direction along the substrate, and extends in a second direction along the substrate, the second direction crossing the first direction. The first member is provided on the insulating member, is positioned between the stacked bodies in the first direction, and extends in a stacking direction of the plurality of electrode films of the stacked bodies. A width in the first direction of the insulating member is larger than a width in the first direction of the first member.

Three-dimensional semiconductor memory device and method for manufacturing the same

A method for manufacturing a semiconductor device includes forming a mask layer including a) one metal from tungsten, tantalum, zirconium, hafnium, molybdenum, niobium, ruthenium, osmium, rhenium, and iridium, b) boron, and c) carbon on a layer to be etched. The mask layer is patterned. A hole or a groove is formed in the layer to be etched by performing dry etching on the layer to be etched using the patterned mask layer. The mask layer includes a first region and a second region. The first region includes boron and the second region includes boron such that a density of boron in the second region is different from a density of boron in the first region, or the first region includes carbon and the second region includes carbon such that a density of carbon in the second region is different from a density of carbon in the first region.

Method for manufacturing semiconductor device

According to one embodiment, a method for manufacturing a semiconductor device includes forming a mask layer on a layer to be etched, the mask layer containing tungsten and boron, a composition ratio of the tungsten being not less than 30%, patterning the mask layer, and performing a dry etching to the layer to be etched using the mask layer being patterned, and forming a hole or a slit in the layer to be etched.

According to one embodiment, a method for manufacturing a semiconductor device includes forming a mask layer on a layer to be etched. The mask layer contains at least one type of a metal, boron, and carbon. The metal is selected from a group including tungsten, tantalum, zirconium, hafnium, molybdenum, niobium, ruthenium, osmium, rhenium and iridium. A composition ratio of the metal is higher than a composition ratio of the boron and a composition ratio of the carbon. The method includes making a hole or a slit in the layer to be etched by performing a dry etching to the layer to be etched using the mask layer being patterned.

According to one embodiment, a method for manufacturing a semiconductor device, wherein an amorphous semiconductor film comprising a microcrystal is annealed using a microwave, to crystallize the amorphous semiconductor film comprising the microcrystal using the microcrystal as a nucleus.

Semiconductor device and method for manufacturing semiconductor device

In one embodiment, a method for manufacturing a semiconductor device is disclosed. The method can include depositing a first amorphous film having a first impurity, depositing a third amorphous lower-layer film on the first amorphous film, forming microcrystals on the third amorphous lower-layer film, depositing a third amorphous upper-layer film on the third amorphous lower-layer film to cover the microcrystals, depositing a second amorphous film having a second impurity on the third amorphous upper-layer film, and radiating microwaves to crystallize the third amorphous lower-layer film and the third amorphous upper-layer film to form a third crystal layer, and crystallize the first amorphous film and the second amorphous film to form a first crystal layer and a second crystal layer.

Semiconductor device and method for manufacturing the same

In one embodiment, a method of manufacturing a back side illuminated imaging device includes forming a semiconductor detection device and a peripheral circuit device on a semiconductor substrate, and bonding the semiconductor substrate onto a holding substrate via the semiconductor detection device and the peripheral circuit device. The method further includes removing the semiconductor substrate from the holding substrate to transfer the semiconductor detection device and the peripheral circuit device onto the holding substrate. The method further includes forming an amorphous semiconductor layer in which impurities are introduced, on the semiconductor detection device transferred onto the holding substrate, and annealing the amorphous semiconductor layer by using a microwave.

Growing community of inventors

Kuwana, Japan

Yusuke Oshiki