Toshiba Storage Device Corporation

Yusuke Nojima

Shinji Koganezawa

According to one embodiment, a micro actuator device, includes: a first piezoelectric element superposed on a first lower support plate coupled to a fixed plate; a second piezoelectric element superposed on a second lower support plate in parallel with the first lower support plate coupled to the fixed plate; a first upper support plate interposing the first piezoelectric element between the first upper support plate and the first lower support plate, and generating strain equal to strain of the first lower support plate when a tensile force of the first piezoelectric element acts on the first lower support plate; and a second upper support plate interposing the second piezoelectric element between the second upper support plate and the second lower support plate, and generating strain equal to strain of the second lower support plate when a tensile force of the second piezoelectric element acts on the second lower support plate.

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Ome, Japan

Yusuke Nojima